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Chris Murray Beard
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Allen, TX, US
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last 30 patents
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Patent Grant
Methods and apparatus to control grayscale photolithography
Patent number
10,466,597
Issue date
Nov 5, 2019
Texas Instruments Incorporated
Lucius M. Sherwin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
MULTI-LEVEL MICROELECTROMECHANICAL SYSTEM STRUCTURE WITH NON-PHOTOD...
Publication number
20230127477
Publication date
Apr 27, 2023
TEXAS INSTRUMENTS INCORPORATED
Christopher Murray BEARD
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SYSTEM AND METHOD FOR ARRAY OF MEMS ELEMENTS
Publication number
20230077129
Publication date
Mar 9, 2023
TEXAS INSTRUMENTS INCORPORATED
Sean Christopher O'BRIEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
METHODS AND APPARATUS TO CONTROL GRAYSCALE PHOTOLITHOGRAPHY
Publication number
20200064745
Publication date
Feb 27, 2020
TEXAS INSTRUMENTS INCORPORATED
Lucius M. Sherwin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHODS AND APPARATUS TO CONTROL GRAYSCALE PHOTOLITHOGRAPHY
Publication number
20190129298
Publication date
May 2, 2019
TEXAS INSTRUMENTS INCORPORATED
Lucius M. Sherwin
B81 - MICRO-STRUCTURAL TECHNOLOGY