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Chris Steely
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Yokneam Ilit, IL
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Patents Grants
last 30 patents
Information
Patent Grant
Overlay mark design for electron beam overlay
Patent number
12,055,859
Issue date
Aug 6, 2024
Inna Steely-Tarshish
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Overlay mark design for electron beam overlay
Patent number
11,862,524
Issue date
Jan 2, 2024
Inna Steely-Tarshish
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Overlay design for electron beam and scatterometry overlay measurem...
Patent number
11,720,031
Issue date
Aug 8, 2023
KLA Corporation
Inna Steely-Tarshish
G01 - MEASURING TESTING
Information
Patent Grant
Overlay mark design for electron beam overlay
Patent number
11,703,767
Issue date
Jul 18, 2023
Inna Steely-Tarshish
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
OVERLAY MARK DESIGN FOR ELECTRON BEAM OVERLAY
Publication number
20230324810
Publication date
Oct 12, 2023
KLA Corporation
Inna Steely-Tarshish
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OVERLAY MARK DESIGN FOR ELECTRON BEAM OVERLAY
Publication number
20220415725
Publication date
Dec 29, 2022
KLA Corporation
Inna Steely-Tarshish
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OVERLAY MARK DESIGN FOR ELECTRON BEAM OVERLAY
Publication number
20220413395
Publication date
Dec 29, 2022
KLA Corporation
Inna Steely-Tarshish
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OVERLAY DESIGN FOR ELECTRON BEAM AND SCATTEROMETRY OVERLAY MEASUREM...
Publication number
20220413394
Publication date
Dec 29, 2022
KLA Corporation
Inna Steely-Tarshish
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY