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Christiaan Johannes Petrus VERSPEEK
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Veldhoven, NL
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last 30 patents
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Patent Grant
Source collector apparatus, lithographic apparatus and method
Patent number
9,964,852
Issue date
May 8, 2018
ASML Netherlands B.V.
Niek Antonius Jacobus Maria Kleemans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Source collector apparatus, lithographic apparatus and method
Patent number
9,841,680
Issue date
Dec 12, 2017
ASML Netherlands B.V.
Niek Antonius Jacobus Maria Kleemans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
SOURCE COLLECTOR APPARATUS, LITHOGRAPHIC APPARATUS AND METHOD
Publication number
20180120711
Publication date
May 3, 2018
ASML NETHERLANDS B.V.
Niek Antonius Jacobus Maria KLEEMANS
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
SOURCE COLLECTOR APPARATUS, LITHOGRAPHIC APPARATUS AND METHOD
Publication number
20160054663
Publication date
Feb 25, 2016
ASML NETHERLANDS B.V.
Niek Antonius Jacobus Maria KLEEMANS
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR