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Patents Grantslast 30 patents

Information Patent Grant
Device and method for processing wafer-shaped articles
- Patent number 9,484,229
- Issue date Nov 1, 2016
- Lam Research AG
- Otto Lach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for processing wafer shaped articles
- Patent number 8,899,246
- Issue date Dec 2, 2014
- Lam Research AG
- Ante Plazonic
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
DEVICE AND METHOD FOR PROCESSING WAFER SHAPED ARTICLES
- Publication number 20130125379
- Publication date May 23, 2013
- LAM RESEARCH AG
- Ante PLAZONIC
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND METHOD FOR PROCESSING WAFER-SHAPED ARTICLES
- Publication number 20130118535
- Publication date May 16, 2013
- LAM RESEARCH AB
- Otto LACH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND PROCESS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES
- Publication number 20120286481
- Publication date Nov 15, 2012
- LAM RESEARCH AG
- Michael PUGGL
- H01 - BASIC ELECTRIC ELEMENTS