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Christian BORSCHEL
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Jena, DE
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last 30 patents
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Patent Grant
Particle beam apparatus and method for operating a particle beam ap...
Patent number
10,814,361
Issue date
Oct 27, 2020
VISTEC ELECTRON BEAM GMBH
Christian Borschel
B08 - CLEANING
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last 30 patents
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Patent Application
PARTICLE BEAM APPARATUS AND METHOD FOR OPERATING A PARTICLE BEAM AP...
Publication number
20160368031
Publication date
Dec 22, 2016
VISTEC ELECTRON BEAM GMBH
Christian BORSCHEL
B08 - CLEANING