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Christian BUERGEL
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Langebruck, DE
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last 30 patents
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Patent Grant
Pattern classification based proximity corrections for reticle fabr...
Patent number
9,500,945
Issue date
Nov 22, 2016
GLOBALFOUNDRIES Singapore Pte. Ltd.
Guoxiang Ning
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
PATTERN CLASSIFICATION BASED PROXIMITY CORRECTIONS FOR RETICLE FABR...
Publication number
20160363853
Publication date
Dec 15, 2016
Guoxiang NING
G06 - COMPUTING CALCULATING COUNTING