Christian Felix Hermanns

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Frankfurt am Main, DE

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for removing a single particulate from a subst...
- Patent number 11,886,126
- Issue date Jan 30, 2024
- Carl Zeiss SMT GmbH
- Klaus Edinger
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR MASK REPAIR
- Publication number 20240419065
- Publication date Dec 19, 2024
- Carl Zeisss SMT GmbH
- Christian Felix Hermanns
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHOD FOR REMOVING A SINGLE PARTICULATE FROM A SUBST...
- Publication number 20240295833
- Publication date Sep 5, 2024
- Carl Zeiss SMT GMBH
- Klaus Edinger
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR MASK REPAIR
- Publication number 20230305386
- Publication date Sep 28, 2023
- Carl Zeiss SMT GMBH
- Christian Felix Hermanns
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR MASK REPAIR
- Publication number 20230280647
- Publication date Sep 7, 2023
- Carl Zeiss SMT GMBH
- Daniel Rhinow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR ETCHING A LITHOGRAPHY MASK
- Publication number 20230185180
- Publication date Jun 15, 2023
- Carl Zeiss SMT GMBH
- Fan Tu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHOD FOR REMOVING A SINGLE PARTICULATE FROM A SUBST...
- Publication number 20220011682
- Publication date Jan 13, 2022
- Carl Zeiss SMT GMBH
- Klaus Edinger
- G06 - COMPUTING CALCULATING COUNTING