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Christian HETTICH
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Konstanz, DE
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Patents Grants
last 30 patents
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Patent Grant
Illumination system of a microlithographic projection exposure appa...
Patent number
9,116,441
Issue date
Aug 25, 2015
Carl Zeiss SMT GmbH
Nils Dieckmann
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for measuring an optical system
Patent number
8,786,849
Issue date
Jul 22, 2014
Carl Zeiss SMT GmbH
Thomas Korb
G01 - MEASURING TESTING
Information
Patent Grant
Illumination system of a microlithographic projection exposure appa...
Patent number
8,169,594
Issue date
May 1, 2012
Carl Zeiss SMT GmbH
Nils Dieckmann
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR MEASURING AN OPTICAL SYSTEM
Publication number
20130271749
Publication date
Oct 17, 2013
Thomas KORB
G01 - MEASURING TESTING
Information
Patent Application
ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPA...
Publication number
20120188527
Publication date
Jul 26, 2012
Carl Zeiss SMT GMBH
Nils Dieckmann
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPA...
Publication number
20090323043
Publication date
Dec 31, 2009
Carl Zeiss SMT AG
Nils Dieckmann
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY