Membership
Tour
Register
Log in
Christian Holfeld
Follow
Person
Dresden, DE
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
EUV mask and method for repairing an EUV mask
Patent number
8,142,958
Issue date
Mar 27, 2012
Advanced Mask Technology Center GmbH & Co. KG
Christian Holfeld
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
EUV Mask and Method for Repairing an EUV Mask
Publication number
20080318138
Publication date
Dec 25, 2008
Advanced Mask Technology Center GmbH & Co. KG
Christian Holfeld
B82 - NANO-TECHNOLOGY
Information
Patent Application
EUV reflection mask and method for producing it
Publication number
20060292459
Publication date
Dec 28, 2006
Frank-Michael Kamm
B82 - NANO-TECHNOLOGY
Information
Patent Application
Lithography mask for the fabrication of semiconductor components
Publication number
20050244723
Publication date
Nov 3, 2005
Christian Holfeld
B82 - NANO-TECHNOLOGY