Christian Illemann

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing chamber and process gas flow deflector for use...
- Patent number 12,018,369
- Issue date Jun 25, 2024
- Infineon Technologies AG
- Matthias Kuenle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for chemical vapor deposition process for semi...
- Patent number 11,149,351
- Issue date Oct 19, 2021
- Infineon Technologies AG
- Matthias Kuenle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING CHAMBER AND PROCESS GAS FLOW DEFLECTOR FOR USE...
- Publication number 20220018023
- Publication date Jan 20, 2022
- Matthias Kuenle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR CHEMICAL VAPOR DEPOSITION PROCESS FOR SEMI...
- Publication number 20190078211
- Publication date Mar 14, 2019
- INFINEON TECHNOLOGIES AG
- Matthias Kuenle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...