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CHRISTIAN KAUFMANN
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BURGSTAEDT, DE
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Patents Grants
last 30 patents
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Patent Grant
Electrostatically actuated micro-mechanical switching device
Patent number
8,610,520
Issue date
Dec 17, 2013
Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
Joerg Froemel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
MEMS vacuum sensor based on the friction principle
Patent number
8,186,225
Issue date
May 29, 2012
Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
Steffen Kurth
G01 - MEASURING TESTING
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Patent Grant
Resonance scanner
Patent number
6,975,442
Issue date
Dec 13, 2005
Jenoptik LDT GmbH
Thomas Gessner
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Micro swivel actuators and a procedure for the production of the same
Patent number
6,016,217
Issue date
Jan 18, 2000
CMS Mikrosystene GmbH Chemnitz
Wolfram Dotzel
G02 - OPTICS
Patents Applications
last 30 patents
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Patent Application
ELECTROSTATICALLY ACTUATED MICRO-MECHANICAL SWITCHING DEVICE
Publication number
20110303515
Publication date
Dec 15, 2011
SONY CORPORATION
JÖERG FRÖEMEL
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MEMS VACUUM SENSOR BASED ON THE FRICTION PRINCIPLE
Publication number
20100024562
Publication date
Feb 4, 2010
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.,
Steffen Kurth
G01 - MEASURING TESTING
Information
Patent Application
Resonance scanner
Publication number
20040130765
Publication date
Jul 8, 2004
Thomas Gessner
B81 - MICRO-STRUCTURAL TECHNOLOGY