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Christian Kempter
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Wittislingen, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Piezoelectric positioning device and positioning method by means of...
Patent number
10,128,429
Issue date
Nov 13, 2018
Carl Zeiss SMT GmbH
Christian Kempter
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Optical component
Patent number
10,078,271
Issue date
Sep 18, 2018
Carl Zeiss SMT GmbH
Severin Waldis
G02 - OPTICS
Information
Patent Grant
Methods and devices for driving micromirrors
Patent number
10,061,202
Issue date
Aug 28, 2018
Carl Zeiss SMT GmbH
Jan Horn
G02 - OPTICS
Information
Patent Grant
Method and arrangement for actuating an element
Patent number
10,025,203
Issue date
Jul 17, 2018
Carl Zeiss SMT GmbH
Gerald Rothenhoefer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Microlithographic projection exposure apparatus
Patent number
9,767,068
Issue date
Sep 19, 2017
Carl Zeiss SMT GmbH
Christian Kempter
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Illumination system for a microlithographic projection exposure app...
Patent number
9,348,232
Issue date
May 24, 2016
Carl Zeiss SMT GmbH
Jan Horn
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods and devices for driving micromirrors
Patent number
8,345,224
Issue date
Jan 1, 2013
Carl Zeiss SMT GmbH
Jan Horn
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
Piezoelectric positioning device and positioning method by means of...
Publication number
20170263843
Publication date
Sep 14, 2017
Carl Zeiss SMT GMBH
Christian KEMPTER
G01 - MEASURING TESTING
Information
Patent Application
METHOD AND ARRANGEMENT FOR ACTUATING AN ELEMENT
Publication number
20170023869
Publication date
Jan 26, 2017
Carl Zeiss SMT GMBH
Gerald Rothenhoefer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL COMPONENT
Publication number
20140327896
Publication date
Nov 6, 2014
Severin Waldis
G02 - OPTICS
Information
Patent Application
MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
Publication number
20130132037
Publication date
May 23, 2013
Carl Zeiss SMT GMBH
Christian Kempter
G01 - MEASURING TESTING
Information
Patent Application
METHODS AND DEVICES FOR DRIVING MICROMIRRORS
Publication number
20130088698
Publication date
Apr 11, 2013
Carl Zeiss SMT GMBH
Jan Horn
G02 - OPTICS
Information
Patent Application
METHODS AND DEVICES FOR DRIVING MICROMIRRORS
Publication number
20110188017
Publication date
Aug 4, 2011
Carl Zeiss SMT GMBH
Jan Horn
G02 - OPTICS
Information
Patent Application
ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APP...
Publication number
20100309449
Publication date
Dec 9, 2010
Carl Zeiss SMT AG
Jan Horn
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY