Christian PUTZI

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Rosenbach, AT

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for processing wafer-shaped articles
- Patent number 9,698,029
- Issue date Jul 4, 2017
- Lam Research AG
- Reinhold Schwarzenbacher
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS FOR PROCESSING A WAFER-SHAPED ARTICLE
- Publication number 20230411177
- Publication date Dec 21, 2023
- LAM RESEARCH AG
- Karl-Heinz HOHENWARTER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR PROCESSING A WAFER
- Publication number 20230360952
- Publication date Nov 9, 2023
- LAM RESEARCH AG
- Michael BRUGGER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VAPOR DELIVERY HEAD FOR PREVENTING STICTION OF HIGH ASPECT RATIO ST...
- Publication number 20210366738
- Publication date Nov 25, 2021
- LAM RESEARCH AG
- Bhaskar BANDARAPU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES
- Publication number 20150235876
- Publication date Aug 20, 2015
- LAM RESEARCH AG
- Reinhold SCHWARZENBACHER
- H01 - BASIC ELECTRIC ELEMENTS