Christian R. Musil

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Cambridge, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Electron beam processing for mask repair
- Patent number 7,727,681
- Issue date Jun 1, 2010
- FEI Company
- Diane K. Stewart
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photolithography mask repair
- Patent number 7,662,524
- Issue date Feb 16, 2010
- FEI Company
- Diane K. Stewart
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photolithography mask repair
- Patent number 7,504,182
- Issue date Mar 17, 2009
- FEI Company
- Diane K. Stewart
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for scanned instrument calibration
- Patent number 6,770,867
- Issue date Aug 3, 2004
- FEI Company
- Henri J. Lezec
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam processing
- Patent number 6,753,538
- Issue date Jun 22, 2004
- FEI Company
- Christian R. Musil
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PHOTOLITHOGRAPHY MASK REPAIR
- Publication number 20090111036
- Publication date Apr 30, 2009
- FEI Company
- Diane K. Stewart
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Electron beam processing for mask repair
- Publication number 20040226814
- Publication date Nov 18, 2004
- Diane K. Stewart
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Photolithography mask repair
- Publication number 20040151991
- Publication date Aug 5, 2004
- Diane K. Stewart
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Repairing defects on photomasks using a charged particle beam and t...
- Publication number 20040121069
- Publication date Jun 24, 2004
- David C. Ferranti
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for scanned instrument calibration
- Publication number 20030085352
- Publication date May 8, 2003
- Henri J. Lezec
- G01 - MEASURING TESTING
Information Patent Application
Electron beam processing
- Publication number 20030047691
- Publication date Mar 13, 2003
- Christian R. Musil
- H01 - BASIC ELECTRIC ELEMENTS