Christian Sparka

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Dresden, DE

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Patents Grantslast 30 patents

Information Patent Grant
Systems and methods for automated multi-zone detection and modeling
- Patent number 10,340,165
- Issue date Jul 2, 2019
- KLA-Tencor Corporation
- Jeremy Nabeth
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Focus recipe determination for a lithographic scanner
- Patent number 9,291,920
- Issue date Mar 22, 2016
- KLA-Tencor Corporation
- James Manka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Systems and Methods for Automated Multi-Zone Detection and Modeling
- Publication number 20170287754
- Publication date Oct 5, 2017
- KLA-Tencor Corporation
- Jeremy Nabeth
- G01 - MEASURING TESTING
Information Patent Application
Focus Recipe Determination for a Lithographic Scanner
- Publication number 20140063478
- Publication date Mar 6, 2014
- KLA-Tencor Corporation
- James Manka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY