Christian Steigerwald

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Heidenheim, DE

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Patents Grantslast 30 patents

Information Patent Grant
Illumination optics for EUV microlithography and related system and...
- Patent number 8,587,767
- Issue date Nov 19, 2013
- Carl Zeiss SMT GmbH
- Damian Fiolka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
ILLUMINATION OPTICS FOR EUV MICROLITHOGRAPHY AND RELATED SYSTEM AND...
- Publication number 20110063598
- Publication date Mar 17, 2011
- Carl Zeiss SMT GMBH
- Damian Fiolka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY