Christian Wald

Person

Aalen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Control apparatus and method for controlling a manipulator in respe...
- Patent number 10,852,642
- Issue date Dec 1, 2020
- Carl Zeiss SMT GmbH
- Bjoern Butscher
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical waveguide for guiding illumination light
- Patent number 10,254,466
- Issue date Apr 9, 2019
- Carl Zeiss SMT GmbH
- Christian Wald
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of operating a projection exposure tool for microlithography
- Patent number 10,241,423
- Issue date Mar 26, 2019
- Carl Zeiss SMT GmbH
- Olaf Conradi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection lens for EUV microlithography, film element and method f...
- Patent number 10,001,631
- Issue date Jun 19, 2018
- Carl Zeiss SMT GmbH
- Boris Bittner
- G02 - OPTICS
Information Patent Grant
Optical assembly
- Patent number 9,939,730
- Issue date Apr 10, 2018
- Carl Zeiss SMT GmbH
- Walter Pauls
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Determination of a corrected variable
- Patent number 9,841,685
- Issue date Dec 12, 2017
- Carl Zeiss SMT GmbH
- Christoph Petri
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical waveguide for guiding illumination light
- Patent number 9,671,548
- Issue date Jun 6, 2017
- Carl Zeiss SMT GmbH
- Christian Wald
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of operating a projection exposure tool for microlithography
- Patent number 9,442,381
- Issue date Sep 13, 2016
- Carl Zeiss SMT GmbH
- Olaf Conradi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
CONTROL APPARATUS AND METHOD FOR CONTROLLING A MANIPULATOR IN RESPE...
- Publication number 20200225587
- Publication date Jul 16, 2020
- Carl Zeiss SMT GMBH
- Bjoern Butscher
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL WAVEGUIDE FOR GUIDING ILLUMINATION LIGHT
- Publication number 20170261680
- Publication date Sep 14, 2017
- Carl Zeiss SMT GMBH
- Christian Wald
- G02 - OPTICS
Information Patent Application
Projection Lens for EUV Microlithography, Film Element and Method f...
- Publication number 20170261730
- Publication date Sep 14, 2017
- Carl Zeiss SMT GMBH
- Boris Bittner
- G02 - OPTICS
Information Patent Application
DETERMINATION OF A CORRECTED VARIABLE
- Publication number 20170068166
- Publication date Mar 9, 2017
- Carl Zeiss SMT GMBH
- Christoph PETRI
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF OPERATING A PROJECTION EXPOSURE TOOL FOR MICROLITHOGRAPHY
- Publication number 20160342097
- Publication date Nov 24, 2016
- Carl Zeiss SMT GMBH
- Olaf Conradi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MIRROR FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE SYSTEM AND METHO...
- Publication number 20160161852
- Publication date Jun 9, 2016
- Carl Zeiss SMT GMBH
- Karl-Heinz SCHUSTER
- G02 - OPTICS
Information Patent Application
OPTICAL ASSEMBLY
- Publication number 20160091798
- Publication date Mar 31, 2016
- Carl Zeiss SMT GMBH
- Walter Pauls
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Optical Waveguide for Guiding Illumination Light
- Publication number 20150362660
- Publication date Dec 17, 2015
- Carl Zeiss SMT GMBH
- Christian Wald
- G02 - OPTICS
Information Patent Application
Projection Lens for EUV Microlithography, Film Element and Method f...
- Publication number 20140347721
- Publication date Nov 27, 2014
- Boris Bittner
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD OF OPERATING A PROJECTION EXPOSURE TOOL FOR MICROLITHOGRAPHY
- Publication number 20130301024
- Publication date Nov 14, 2013
- Olaf Conradi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Christian Wald

Person

Patents Grantslast 30 patents

Control apparatus and method for controlling a manipulator in respe...

Optical waveguide for guiding illumination light

Method of operating a projection exposure tool for microlithography

Projection lens for EUV microlithography, film element and method f...

Optical assembly

Determination of a corrected variable

Optical waveguide for guiding illumination light

Method of operating a projection exposure tool for microlithography

Patents Applicationslast 30 patents

CONTROL APPARATUS AND METHOD FOR CONTROLLING A MANIPULATOR IN RESPE...

OPTICAL WAVEGUIDE FOR GUIDING ILLUMINATION LIGHT

Projection Lens for EUV Microlithography, Film Element and Method f...

DETERMINATION OF A CORRECTED VARIABLE

METHOD OF OPERATING A PROJECTION EXPOSURE TOOL FOR MICROLITHOGRAPHY

MIRROR FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE SYSTEM AND METHO...

OPTICAL ASSEMBLY

Optical Waveguide for Guiding Illumination Light

Projection Lens for EUV Microlithography, Film Element and Method f...

METHOD OF OPERATING A PROJECTION EXPOSURE TOOL FOR MICROLITHOGRAPHY