Christian Wolters

Person

Campbell, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Methods and systems for optical surface defect material characteriz...
- Patent number 11,703,460
- Issue date Jul 18, 2023
- KLA Corporation
- Zhiwei Xu
- G01 - MEASURING TESTING
Information Patent Grant
Surface defect inspection with large particle monitoring and laser...
- Patent number 10,324,045
- Issue date Jun 18, 2019
- KLA-Tencor Corporation
- Steve (Yifeng) Cui
- G01 - MEASURING TESTING
Information Patent Grant
System and method for reducing radiation-induced false counts in an...
- Patent number 10,241,217
- Issue date Mar 26, 2019
- KLA-Tencor Corporation
- Ximan Jiang
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for producing and measuring dynamically focuse...
- Patent number 10,215,712
- Issue date Feb 26, 2019
- KLA-Tencor Corporation
- Christian Wolters
- G01 - MEASURING TESTING
Information Patent Grant
Haze and defect distribution and aperture configuration in surface...
- Patent number 10,088,345
- Issue date Oct 2, 2018
- KLA-Tencor Corporation
- Chuanyong Huang
- G01 - MEASURING TESTING
Information Patent Grant
TDI sensor in a darkfield system
- Patent number 9,891,177
- Issue date Feb 13, 2018
- KLA-Tencor Corporation
- Jijen Vazhaeparambil
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System and method for reducing radiation-induced false counts in an...
- Patent number 9,841,512
- Issue date Dec 12, 2017
- KLA-Tencor Corporation
- Ximan Jiang
- G01 - MEASURING TESTING
Information Patent Grant
Laser with integrated multi line or scanning beam capability
- Patent number 9,678,350
- Issue date Jun 13, 2017
- KLA-Tencor Corporation
- Christian Wolters
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Inspection beam shaping for improved detection sensitivity
- Patent number 9,255,891
- Issue date Feb 9, 2016
- KLA-Tencor Corporation
- Christian Wolters
- G01 - MEASURING TESTING
Information Patent Grant
Illumination energy management in surface inspection
- Patent number 9,194,812
- Issue date Nov 24, 2015
- KLA-Tencor Corporation
- Christian Wolters
- F21 - LIGHTING
Information Patent Grant
Multi-spot defect inspection system
- Patent number 9,182,358
- Issue date Nov 10, 2015
- KLA-Tencor Corporation
- Zhiwei Xu
- G01 - MEASURING TESTING
Information Patent Grant
Surface scanning inspection system with independently adjustable sc...
- Patent number 9,116,132
- Issue date Aug 25, 2015
- KLA-Tencor Corporation
- Christian Wolters
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for producing and measuring dynamically focuss...
- Patent number 9,068,952
- Issue date Jun 30, 2015
- KLA-Tencor Corporation
- Aleksey Petrenko
- G01 - MEASURING TESTING
Information Patent Grant
Monitoring incident beam position in a wafer inspection system
- Patent number 8,934,091
- Issue date Jan 13, 2015
- KLA-Tencor Corp.
- Juergen Reich
- G01 - MEASURING TESTING
Information Patent Grant
Surface scanning inspection system with adjustable scan pitch
- Patent number 8,885,158
- Issue date Nov 11, 2014
- KLA-Tencor Corporation
- Christian Wolters
- G01 - MEASURING TESTING
Information Patent Grant
Air bearing for substrate inspection device
- Patent number 8,817,250
- Issue date Aug 26, 2014
- KLA-Tencor Corporation
- Paul Doyle
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Illumination energy management in surface inspection
- Patent number 8,786,850
- Issue date Jul 22, 2014
- KLA-Tencor Corporation
- Christian Wolters
- F21 - LIGHTING
Information Patent Grant
Large particle detection for multi-spot surface scanning inspection...
- Patent number 8,755,044
- Issue date Jun 17, 2014
- KLA-Tencor Corporation
- Juergen Reich
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods for inspecting specimens including specimens th...
- Patent number 8,582,094
- Issue date Nov 12, 2013
- KLA-Tencor Technologies Corp.
- David Shortt
- G01 - MEASURING TESTING
Information Patent Grant
Fast laser power control with improved reliability for surface insp...
- Patent number 8,294,887
- Issue date Oct 23, 2012
- KLA-Tencor Corporation
- Stephen Biellak
- G01 - MEASURING TESTING
Information Patent Grant
Dynamic range extension in surface inspection systems
- Patent number 8,134,698
- Issue date Mar 13, 2012
- KLA-Tencor Corporation
- Christian Wolters
- G01 - MEASURING TESTING
Information Patent Grant
Method for improving edge handling chuck aerodynamics
- Patent number 8,042,254
- Issue date Oct 25, 2011
- KLA-Tencor Corporation
- Alexander Belyaev
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Systems and methods for inspecting a specimen with light at varying...
- Patent number 7,787,114
- Issue date Aug 31, 2010
- KLA-Tencor Technologies Corp.
- Christian Wolters
- G01 - MEASURING TESTING
Information Patent Grant
Systems, circuits and methods for extending the detection range of...
- Patent number 7,777,875
- Issue date Aug 17, 2010
- KLA-Tencor Technologies Corp,
- Christian H. Wolters
- G01 - MEASURING TESTING
Information Patent Grant
Contemporaneous surface and edge inspection
- Patent number 7,773,212
- Issue date Aug 10, 2010
- KLA-Tencor Corporation
- Christian Wolters
- G01 - MEASURING TESTING
Information Patent Grant
Inspection systems and methods for extending the detection range of...
- Patent number 7,746,462
- Issue date Jun 29, 2010
- KLA-Tencor Technologies Corporation
- Zhongping Cai
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods for inspecting a wafer with increased sensitivity
- Patent number 7,697,129
- Issue date Apr 13, 2010
- KLA-Tencor Technologies Corp.
- Kurt L. Haller
- G01 - MEASURING TESTING
Information Patent Grant
Systems, circuits and methods for reducing thermal damage and exten...
- Patent number 7,671,982
- Issue date Mar 2, 2010
- KLA-Tencor Technologies Corp.
- Christian H. Wolters
- G01 - MEASURING TESTING
Information Patent Grant
Stabilizing a substrate using a vacuum preload air bearing chuck
- Patent number 7,607,647
- Issue date Oct 27, 2009
- KLA-Tencor Technologies Corporation
- Guoheng Zhao
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
System and method to create haze standard
- Patent number 7,605,915
- Issue date Oct 20, 2009
- KLA-Tencor Corporation
- Christian Wolters
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Methods And Systems For Optical Surface Defect Material Characteriz...
- Publication number 20210010949
- Publication date Jan 14, 2021
- KLA Corporation
- Zhiwei Xu
- G01 - MEASURING TESTING
Information Patent Application
System and Method for Reducing Radiation-Induced False Counts in an...
- Publication number 20180045837
- Publication date Feb 15, 2018
- KLA-Tencor Corporation
- Ximan Jiang
- G01 - MEASURING TESTING
Information Patent Application
Surface Defect Inspection With Large Particle Monitoring And Laser...
- Publication number 20180038803
- Publication date Feb 8, 2018
- KLA-Tencor Corporation
- Steve (Yifeng) Cui
- G01 - MEASURING TESTING
Information Patent Application
System and Method for Reducing Radiation-Induced False Counts in an...
- Publication number 20160334516
- Publication date Nov 17, 2016
- KLA-Tencor Corporation
- Ximan Jiang
- G01 - MEASURING TESTING
Information Patent Application
TDI Sensor in a Darkfield System
- Publication number 20160097727
- Publication date Apr 7, 2016
- KLA-Tencor Corporation
- Jijen Vazhaeparambil
- G01 - MEASURING TESTING
Information Patent Application
Method and Apparatus for Producing and Measuring Dynamically Focuse...
- Publication number 20150330907
- Publication date Nov 19, 2015
- KLA-Tencor Corporation
- Christian Wolters
- G01 - MEASURING TESTING
Information Patent Application
Surface Scanning Inspection System With Independently Adjustable Sc...
- Publication number 20150055128
- Publication date Feb 26, 2015
- KLA-Tencor Corporation
- Christian Wolters
- G01 - MEASURING TESTING
Information Patent Application
Illumination Energy Management in Surface Inspection
- Publication number 20140328043
- Publication date Nov 6, 2014
- Christian Wolters
- G01 - MEASURING TESTING
Information Patent Application
Multi-Spot Defect Inspection System
- Publication number 20140268118
- Publication date Sep 18, 2014
- KLA-Tencor Corporation
- Zhiwei Xu
- G01 - MEASURING TESTING
Information Patent Application
Inspection Beam Shaping For Improved Detection Sensitivity
- Publication number 20140139829
- Publication date May 22, 2014
- Christian Wolters
- G01 - MEASURING TESTING
Information Patent Application
Illumination Energy Management in Surface Inspection
- Publication number 20140118729
- Publication date May 1, 2014
- KLA-Tencor Corporation
- Christian Wolters
- G01 - MEASURING TESTING
Information Patent Application
Monitoring Incident Beam Position in a Wafer Inspection System
- Publication number 20140071437
- Publication date Mar 13, 2014
- KLA-Tencor Corporation
- Juergen Reich
- G01 - MEASURING TESTING
Information Patent Application
Laser with Integrated Multi Line or Scanning Beam Capability
- Publication number 20130250385
- Publication date Sep 26, 2013
- KLA-Tencor Corporation
- Christian Wolters
- G02 - OPTICS
Information Patent Application
Large Particle Detection For Multi-Spot Surface Scanning Inspection...
- Publication number 20130050689
- Publication date Feb 28, 2013
- KLA-Tencor Corporation
- Juergen Reich
- G01 - MEASURING TESTING
Information Patent Application
Surface Scanning Inspection System With Adjustable Scan Pitch
- Publication number 20120229802
- Publication date Sep 13, 2012
- KLA-Tencor Corporation
- Christian Wolters
- G01 - MEASURING TESTING
Information Patent Application
Referenced Inspection Device
- Publication number 20120062877
- Publication date Mar 15, 2012
- KLA-Tencor Corporation
- Paul Doyle
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for producing and Measuring dynamically focuss...
- Publication number 20110051132
- Publication date Mar 3, 2011
- Aleksey Petrenko
- G02 - OPTICS
Information Patent Application
SYSTEMS, CIRCUITS AND METHODS FOR REDUCING THERMAL DAMAGE AND EXTEN...
- Publication number 20090096505
- Publication date Apr 16, 2009
- KLA-Tencor Technologies Corporation
- Christian H. Wolters
- G01 - MEASURING TESTING
Information Patent Application
SYSTEMS, CIRCUITS AND METHODS FOR EXTENDING THE DETECTION RANGE OF...
- Publication number 20090040511
- Publication date Feb 12, 2009
- KLA-Tencor Technologies Corporation
- Christian H. Wolters
- G01 - MEASURING TESTING
Information Patent Application
SYSTEMS AND METHODS FOR INSPECTING A WAFER WITH INCREASED SENSITIVITY
- Publication number 20090009754
- Publication date Jan 8, 2009
- KLA-Tencor Technologies Corporation
- Kurt L. Haller
- G01 - MEASURING TESTING
Information Patent Application
SYSTEMS AND METHODS FOR INSPECTING A SPECIMEN WITH LIGHT AT VARYING...
- Publication number 20080304069
- Publication date Dec 11, 2008
- Christian Wolters
- G01 - MEASURING TESTING
Information Patent Application
Inspection Systems and Methods for Extending the Detection Range of...
- Publication number 20080291454
- Publication date Nov 27, 2008
- KLA-TENCOR TECHNOLOGIES CORP.
- Zhongping Cai
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD TO CREATE HAZE STANDARD
- Publication number 20080245958
- Publication date Oct 9, 2008
- Christian Wolters
- G01 - MEASURING TESTING
Information Patent Application
STABILIZING A SUBSTRATE USING A VACUUM PRELOAD AIR BEARING CHUCK
- Publication number 20080229811
- Publication date Sep 25, 2008
- KLA-Tencor Technologies Corporation
- Guoheng Zhao
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Systems and methods for inspecting a wafer with increased sensitivity
- Publication number 20070132987
- Publication date Jun 14, 2007
- Kurt L. Haller
- G01 - MEASURING TESTING
Information Patent Application
Systems, circuits and methods for extending the detection range of...
- Publication number 20070013899
- Publication date Jan 18, 2007
- Christian H. Wolters
- G01 - MEASURING TESTING
Information Patent Application
Systems, circuits and methods for reducing thermal damage and exten...
- Publication number 20070013898
- Publication date Jan 18, 2007
- Christian H. Wolters
- G01 - MEASURING TESTING
Information Patent Application
Systems, circuits and methods for extending the detection range of...
- Publication number 20070012867
- Publication date Jan 18, 2007
- Christian H. Wolters
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
Methods and systems for determining drift in a position of a light...
- Publication number 20060285112
- Publication date Dec 21, 2006
- Juergen Reich
- G01 - MEASURING TESTING
Information Patent Application
Illumination energy management in surface inspection
- Publication number 20060256325
- Publication date Nov 16, 2006
- KLA-Tencor Technologies Corp.
- Wayne Mcmillan
- G01 - MEASURING TESTING

Christian Wolters

Person

Patents Grantslast 30 patents

Methods and systems for optical surface defect material characteriz...

Surface defect inspection with large particle monitoring and laser...

System and method for reducing radiation-induced false counts in an...

Method and apparatus for producing and measuring dynamically focuse...

Haze and defect distribution and aperture configuration in surface...

TDI sensor in a darkfield system

System and method for reducing radiation-induced false counts in an...

Laser with integrated multi line or scanning beam capability

Inspection beam shaping for improved detection sensitivity

Illumination energy management in surface inspection

Multi-spot defect inspection system

Surface scanning inspection system with independently adjustable sc...

Method and apparatus for producing and measuring dynamically focuss...

Monitoring incident beam position in a wafer inspection system

Surface scanning inspection system with adjustable scan pitch

Air bearing for substrate inspection device

Illumination energy management in surface inspection

Large particle detection for multi-spot surface scanning inspection...

Systems and methods for inspecting specimens including specimens th...

Fast laser power control with improved reliability for surface insp...

Dynamic range extension in surface inspection systems

Method for improving edge handling chuck aerodynamics

Systems and methods for inspecting a specimen with light at varying...

Systems, circuits and methods for extending the detection range of...

Contemporaneous surface and edge inspection

Inspection systems and methods for extending the detection range of...

Systems and methods for inspecting a wafer with increased sensitivity

Systems, circuits and methods for reducing thermal damage and exten...

Stabilizing a substrate using a vacuum preload air bearing chuck

System and method to create haze standard

Patents Applicationslast 30 patents

Methods And Systems For Optical Surface Defect Material Characteriz...

System and Method for Reducing Radiation-Induced False Counts in an...

Surface Defect Inspection With Large Particle Monitoring And Laser...

System and Method for Reducing Radiation-Induced False Counts in an...

TDI Sensor in a Darkfield System

Method and Apparatus for Producing and Measuring Dynamically Focuse...

Surface Scanning Inspection System With Independently Adjustable Sc...

Illumination Energy Management in Surface Inspection

Multi-Spot Defect Inspection System

Inspection Beam Shaping For Improved Detection Sensitivity

Illumination Energy Management in Surface Inspection

Monitoring Incident Beam Position in a Wafer Inspection System

Laser with Integrated Multi Line or Scanning Beam Capability

Large Particle Detection For Multi-Spot Surface Scanning Inspection...

Surface Scanning Inspection System With Adjustable Scan Pitch

Referenced Inspection Device

Method and apparatus for producing and Measuring dynamically focuss...

SYSTEMS, CIRCUITS AND METHODS FOR REDUCING THERMAL DAMAGE AND EXTEN...

SYSTEMS, CIRCUITS AND METHODS FOR EXTENDING THE DETECTION RANGE OF...

SYSTEMS AND METHODS FOR INSPECTING A WAFER WITH INCREASED SENSITIVITY

SYSTEMS AND METHODS FOR INSPECTING A SPECIMEN WITH LIGHT AT VARYING...

Inspection Systems and Methods for Extending the Detection Range of...

SYSTEM AND METHOD TO CREATE HAZE STANDARD

STABILIZING A SUBSTRATE USING A VACUUM PRELOAD AIR BEARING CHUCK

Systems and methods for inspecting a wafer with increased sensitivity

Systems, circuits and methods for extending the detection range of...

Systems, circuits and methods for reducing thermal damage and exten...

Systems, circuits and methods for extending the detection range of...

Methods and systems for determining drift in a position of a light...

Illumination energy management in surface inspection