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Christian ZIENER
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Jena, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Method for producing an optical element comprising micro-optical st...
Patent number
10,534,152
Issue date
Jan 14, 2020
Jenoptik Optical Systems GmbH
Christian Ziener
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Arrangement for generating extreme ultraviolet radiation by means o...
Patent number
8,008,595
Issue date
Aug 30, 2011
Xtreme technologies GmbH
Guido Hergenhan
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Arrangement and method for the generation of extreme ultraviolet ra...
Patent number
7,812,542
Issue date
Oct 12, 2010
XTREME Technologies GmbH
Guido Hergenhan
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Arrangement for radiation generation by means of a gas discharge
Patent number
7,800,086
Issue date
Sep 21, 2010
XTREME Technologies GmbH
Christian Ziener
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Arrangement for the generation of extreme ultraviolet radiation by...
Patent number
7,649,187
Issue date
Jan 19, 2010
Xtreme technologies GmbH
Guido Hergenhan
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Arrangement and method for the generation of extreme ultraviolet ra...
Patent number
7,531,820
Issue date
May 12, 2009
Xtreme technologies GmbH
Guido Hergenhan
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Arrangement for generating extreme ultraviolet radiation based on a...
Patent number
7,477,673
Issue date
Jan 13, 2009
Xtreme technologies GmbH
Christian Ziener
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Arrangement for providing target material for the generation of sho...
Patent number
7,405,413
Issue date
Jul 29, 2008
Xtreme technologies GmbH
Guido Hergenhan
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Apparatus for the temporally stable generation of EUV radiation by...
Patent number
7,274,030
Issue date
Sep 25, 2007
Xtreme technologies GmbH
Guido Hergenhan
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method and arrangement for the plasma-based generation of intensive...
Patent number
7,250,621
Issue date
Jul 31, 2007
Xtreme technologies GmbH
Kai Gaebel
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Arrangement for the generation of a pulsed laser beam of high avera...
Patent number
7,218,651
Issue date
May 15, 2007
Xtreme technologies GmbH
Guido Hergenhan
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Method and arrangement for the plasma-based generation of soft x-ra...
Patent number
7,161,163
Issue date
Jan 9, 2007
Xtreme technologies GmbH
Kai Gaebel
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Arrangement for the stabilization of the radiation emission of a pl...
Patent number
7,122,814
Issue date
Oct 17, 2006
Xtreme technologies GmbH
Guido Hergenhan
G01 - MEASURING TESTING
Information
Patent Grant
Arrangement for the generation of intensive short-wave radiation ba...
Patent number
6,995,382
Issue date
Feb 7, 2006
Xtreme technologies GmbH
Christian Ziener
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR PRODUCING AN OPTICAL ELEMENT COMPRISING MICRO-OPTICAL ST...
Publication number
20170160510
Publication date
Jun 8, 2017
JENOPTIK OPTICAL SYSTEMS GMBH
Christian ZIENER
G02 - OPTICS
Information
Patent Application
ARRANGEMENT AND METHOD FOR THE GENERATION OF EXTREME ULTRAVIOLET RA...
Publication number
20080180029
Publication date
Jul 31, 2008
XTREME technologies GmbH;
Guido Hergenhan
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
ARRANGEMENT FOR THE GENERATION OF EXTREME ULTRAVIOLET RADIATION BY...
Publication number
20080006783
Publication date
Jan 10, 2008
XTREME technologies GmbH;
Guido Hergenhan
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
ARRANGEMENT FOR GENERATING EXTREME ULTRAVIOLET RADIATION BASED ON A...
Publication number
20070228299
Publication date
Oct 4, 2007
XTREME technologies GmbH;
Christian Ziener
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
ARRANGEMENT AND METHOD FOR THE GENERATION OF EXTREME ULTRAVIOLET RA...
Publication number
20070085044
Publication date
Apr 19, 2007
XTREME technologies GmbH;
Guido Hergenhan
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
ARRANGEMENT FOR RADIATION GENERATION BY MEANS OF A GAS DISCHARGE
Publication number
20070040511
Publication date
Feb 22, 2007
XTREME technologies GmbH;
Christian ZIENER
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method and arrangement for the efficient generation of short-wavele...
Publication number
20060215712
Publication date
Sep 28, 2006
XTREME technologies GmbH;
Christian Ziener
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Arrangement for the generation of a pulsed laser beam of high avera...
Publication number
20060140232
Publication date
Jun 29, 2006
XTREME technologies GmbH;
Guido Hergenhan
B82 - NANO-TECHNOLOGY
Information
Patent Application
Arrangement for providing target material for the generation of sho...
Publication number
20060024216
Publication date
Feb 2, 2006
XTREME technologies GmbH;
Guido Hergenhan
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Apparatus for the temporally stable generation of EUV radiation by...
Publication number
20050274912
Publication date
Dec 15, 2005
XTREME technologies GmbH;
Guido Hergenhan
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method and arrangement for the plasma-based generation of intensive...
Publication number
20050258768
Publication date
Nov 24, 2005
XTREME technologies GmbH;
Kai Gaebel
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method and arrangement for the plasma-based generation of soft x-ra...
Publication number
20050169429
Publication date
Aug 4, 2005
XTREME technologies GmbH;
Kai Gaebel
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Arrangement for the stabilization of the radiation emission of a pl...
Publication number
20040195529
Publication date
Oct 7, 2004
Guido Hergenhan
G01 - MEASURING TESTING
Information
Patent Application
Arrangement for the generation of intensive short-wave radiation ba...
Publication number
20040159802
Publication date
Aug 19, 2004
Christian Ziener
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR