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Christie Roderick Kingsley Marrian
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San Jose, CA, US
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last 30 patents
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Patent Grant
Method for reducing proximity effects in electron beam lithography
Patent number
7,038,204
Issue date
May 2, 2006
International Business Machines Corporation
Christie Roderick Kingsley Marrian
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Method for reducing proximity effects in electron beam lithography
Publication number
20050263722
Publication date
Dec 1, 2005
Christie Roderick Kingsley Marrian
B82 - NANO-TECHNOLOGY