Membership
Tour
Register
Log in
Christine Sieler
Follow
Person
Gerstetten, DE
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Process for the decontamination of microlithographic projection exp...
Patent number
6,936,825
Issue date
Aug 30, 2005
Carl Zeiss SMT AG
Michael Gerhard
B08 - CLEANING
Patents Applications
last 30 patents
Information
Patent Application
Process for the decontamination of microlithographic projection exp...
Publication number
20010026402
Publication date
Oct 4, 2001
Michael Gerhard
B08 - CLEANING