Christof Baur

Person

Darmstadt, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatuses for disposing of excess material of a photol...
- Patent number 12,164,226
- Issue date Dec 10, 2024
- Carl Zeiss SMT GmbH
- Michael Budach
- B08 - CLEANING
Information Patent Grant
Methods and devices for extending a time period until changing a me...
- Patent number 11,977,097
- Issue date May 7, 2024
- Carl Zeiss SMT GmbH
- Gabriel Baralia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for operating a bending beam in a closed control...
- Patent number 11,965,910
- Issue date Apr 23, 2024
- Carl Zeiss SMT GmbH
- Christof Baur
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for removing a particle from a photolithograph...
- Patent number 11,899,359
- Issue date Feb 13, 2024
- Carl Zeiss SMT GmbH
- Christof Baur
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method for removing a single particulate from a subst...
- Patent number 11,886,126
- Issue date Jan 30, 2024
- Carl Zeiss SMT GmbH
- Klaus Edinger
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatuses for disposing of excess material of a photol...
- Patent number 11,874,598
- Issue date Jan 16, 2024
- Carl Zeiss SMT GmbH
- Michael Budach
- B08 - CLEANING
Information Patent Grant
Apparatus and method for a scanning probe microscope
- Patent number 11,796,563
- Issue date Oct 24, 2023
- Carl Zeiss SMT GmbH
- Ulrich Matejka
- G01 - MEASURING TESTING
Information Patent Grant
Device and method for analyzing a defect of a photolithographic mas...
- Patent number 11,733,186
- Issue date Aug 22, 2023
- Carl Zeiss SMT GmbH
- Gabriel Baralia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for examining a measuring tip of a scanning pr...
- Patent number 11,680,963
- Issue date Jun 20, 2023
- Carl Zeiss SMT GmbH
- Kinga Kornilov
- G01 - MEASURING TESTING
Information Patent Grant
Device and method for operating a bending beam in a closed control...
- Patent number 11,630,124
- Issue date Apr 18, 2023
- Carl Zeiss SMT GmbH
- Christof Baur
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for examining and/or processing a sample
- Patent number 11,592,461
- Issue date Feb 28, 2023
- Carl Zeiss SMT GmbH
- Christof Baur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for removing a particle from a photolithograph...
- Patent number 11,429,020
- Issue date Aug 30, 2022
- Carl Zeiss SMT GmbH
- Christof Baur
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods and devices for extending a time period until changing a me...
- Patent number 11,353,478
- Issue date Jun 7, 2022
- Carl Zeiss SMT GmbH
- Gabriel Baralia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for examining and/or processing a sample
- Patent number 11,262,378
- Issue date Mar 1, 2022
- Carl Zeiss SMT GmbH
- Christof Baur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for a scanning probe microscope
- Patent number 11,237,185
- Issue date Feb 1, 2022
- Carl Zeiss SMT GmbH
- Ulrich Matejka
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for examining a measuring tip of a scanning pr...
- Patent number 11,237,187
- Issue date Feb 1, 2022
- Carl Zeiss SMT GmbH
- Kinga Kornilov
- G01 - MEASURING TESTING
Information Patent Grant
Scanning probe microscope and method for increasing a scan speed of...
- Patent number 11,054,439
- Issue date Jul 6, 2021
- Carl Zeiss SMT GmbH
- Christof Baur
- G01 - MEASURING TESTING
Information Patent Grant
Device and method for analysing a defect of a photolithographic mas...
- Patent number 10,983,075
- Issue date Apr 20, 2021
- Carl Zeiss SMT GmbH
- Gabriel Baralia
- G01 - MEASURING TESTING
Information Patent Grant
Probe system and method for receiving a probe of a scanning probe m...
- Patent number 10,578,644
- Issue date Mar 3, 2020
- Carl Zeiss SMT GmbH
- Christof Baur
- G01 - MEASURING TESTING
Information Patent Grant
Beam blanker and method for blanking a charged particle beam
- Patent number 10,410,820
- Issue date Sep 10, 2019
- Carl Zeiss SMT GmbH
- Michael Budach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning probe microscope and method for examining a surface with a...
- Patent number 10,119,990
- Issue date Nov 6, 2018
- Carl Zeiss SMT GmbH
- Christof Baur
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for avoiding damage when analysing a sample su...
- Patent number 9,995,764
- Issue date Jun 12, 2018
- Carl Zeiss SMT GmbH
- Hans Hermann Pieper
- G01 - MEASURING TESTING
Information Patent Grant
Scanning particle microscope and method for determining a position...
- Patent number 9,336,983
- Issue date May 10, 2016
- Carl Zeiss SMT GmbH
- Michael Budach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for investigating an object
- Patent number 9,115,981
- Issue date Aug 25, 2015
- Carl Zeiss SMS GmbH
- Christof Baur
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Apparatus and method for analyzing and modifying a specimen surface
- Patent number 8,769,709
- Issue date Jul 1, 2014
- Carl Zeiss SMS GmbH
- Christof Baur
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHOD FOR REMOVING A SINGLE PARTICULATE FROM A SUBST...
- Publication number 20240295833
- Publication date Sep 5, 2024
- Carl Zeiss SMT GMBH
- Klaus Edinger
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHODS AND DEVICES FOR EXTENDING A TIME PERIOD UNTIL CHANGING A ME...
- Publication number 20240272198
- Publication date Aug 15, 2024
- Carl Zeiss SMT GMBH
- Gabriel Baralia
- G01 - MEASURING TESTING
Information Patent Application
DEVICE AND METHOD FOR OPERATING A BENDING BEAM IN A CLOSED CONTROL...
- Publication number 20240230709
- Publication date Jul 11, 2024
- Carl Zeiss SMT GMBH
- Christof Baur
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR REMOVING A PARTICLE FROM A PHOTOLITHOGRAPH...
- Publication number 20240077800
- Publication date Mar 7, 2024
- Carl Zeiss SMT GMBH
- Christof Baur
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR PROCESSING A SAMPLE
- Publication number 20230418153
- Publication date Dec 28, 2023
- Carl Zeiss SMT GMBH
- Christof Baur
- G01 - MEASURING TESTING
Information Patent Application
DEVICE AND METHOD FOR OPERATING A BENDING BEAM IN A CLOSED CONTROL...
- Publication number 20230251285
- Publication date Aug 10, 2023
- Carl Zeiss SMT GMBH
- Christof Baur
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND DEVICE FOR DETERMINING AN ALIGNMENT OF A PHOTOMASK ON A...
- Publication number 20230152089
- Publication date May 18, 2023
- Carl Zeiss SMT GMBH
- Christof Baur
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR REMOVING A PARTICLE FROM A PHOTOLITHOGRAPH...
- Publication number 20220357653
- Publication date Nov 10, 2022
- Carl Zeiss SMT GMBH
- Christof Baur
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUSES FOR DISPOSING OF EXCESS MATERIAL OF A PHOTOL...
- Publication number 20220317564
- Publication date Oct 6, 2022
- Carl Zeiss SMT GMBH
- Michael Budach
- B08 - CLEANING
Information Patent Application
METHOD AND APPARATUSES FOR DISPOSING OF EXCESS MATERIAL OF A PHOTOL...
- Publication number 20220317565
- Publication date Oct 6, 2022
- Carl Zeiss SMT GMBH
- Michael Budach
- B08 - CLEANING
Information Patent Application
METHOD, DEVICE AND COMPUTER PROGRAM FOR REPAIRING A MASK DEFECT
- Publication number 20220308443
- Publication date Sep 29, 2022
- Carl Zeiss SMT GMBH
- Johannes Schöneberg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUSES FOR DISPOSING OF EXCESS MATERIAL OF A PHOTOL...
- Publication number 20220299864
- Publication date Sep 22, 2022
- Carl Zeiss SMT GMBH
- Michael Budach
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS AND DEVICES FOR EXTENDING A TIME PERIOD UNTIL CHANGING A ME...
- Publication number 20220291255
- Publication date Sep 15, 2022
- Carl Zeiss SMT GMBH
- Gabriel Baralia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR EXAMINING AND/OR PROCESSING A SAMPLE
- Publication number 20220178965
- Publication date Jun 9, 2022
- Carl Zeiss SMT GMBH
- Christof Baur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR A SCANNING PROBE MICROSCOPE
- Publication number 20220146548
- Publication date May 12, 2022
- Carl Zeiss SMT GMBH
- Ulrich Matejka
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR EXAMINING A MEASURING TIP OF A SCANNING PR...
- Publication number 20220107340
- Publication date Apr 7, 2022
- Carl Zeiss SMT GMBH
- Kinga Kornilov
- G01 - MEASURING TESTING
Information Patent Application
DEVICE AND METHOD FOR OPERATING A BENDING BEAM IN A CLOSED CONTROL...
- Publication number 20220082583
- Publication date Mar 17, 2022
- Carl Zeiss SMT GMBH
- Christof Baur
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD FOR REMOVING A SINGLE PARTICULATE FROM A SUBST...
- Publication number 20220011682
- Publication date Jan 13, 2022
- Carl Zeiss SMT GMBH
- Klaus Edinger
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEVICE AND METHOD FOR ANALYSING A DEFECT OF A PHOTOLITHOGRAPHIC MAS...
- Publication number 20210247336
- Publication date Aug 12, 2021
- Carl Zeiss SMT GMBH
- Gabriel Baralia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR EXAMINING AND/OR PROCESSING A SAMPLE
- Publication number 20210109126
- Publication date Apr 15, 2021
- Carl Zeiss SMT GMBH
- Christof Baur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR REMOVING A PARTICLE FROM A PHOTOLITHOGRAPH...
- Publication number 20210048744
- Publication date Feb 18, 2021
- Carl Zeiss SMT GMBH
- Christof Baur
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR EXAMINING A MEASURING TIP OF A SCANNING PR...
- Publication number 20200141972
- Publication date May 7, 2020
- Carl Zeiss SMT GMBH
- Kinga Kornilov
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUSES FOR DISPOSING OF EXCESS MATERIAL OF A PHOTOL...
- Publication number 20200103751
- Publication date Apr 2, 2020
- Carl Zeiss SMT GMBH
- Michael Budach
- B08 - CLEANING
Information Patent Application
APPARATUS AND METHOD FOR A SCANNING PROBE MICROSCOPE
- Publication number 20200025796
- Publication date Jan 23, 2020
- Carl Zeiss SMT GMBH
- Ulrich Matejka
- G01 - MEASURING TESTING
Information Patent Application
METHODS AND DEVICES FOR EXTENDING A TIME PERIOD UNTIL CHANGING A ME...
- Publication number 20190317126
- Publication date Oct 17, 2019
- Carl Zeiss SMT GMBH
- Gabriel Baralia
- G01 - MEASURING TESTING
Information Patent Application
SCANNING PROBE MICROSCOPE AND METHOD FOR INCREASING A SCAN SPEED OF...
- Publication number 20190250185
- Publication date Aug 15, 2019
- Carl Zeiss SMT GMBH
- Christof Baur
- G01 - MEASURING TESTING
Information Patent Application
BEAM BLANKER AND METHOD FOR BLANKING A CHARGED PARTICLE BEAM
- Publication number 20180151327
- Publication date May 31, 2018
- Carl Zeiss SMT GMBH
- Michael Budach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROBE SYSTEM AND METHOD FOR RECEIVING A PROBE OF A SCANNING PROBE M...
- Publication number 20180095108
- Publication date Apr 5, 2018
- Carl Zeiss SMT GMBH
- Christof Baur
- G01 - MEASURING TESTING
Information Patent Application
DEVICE AND METHOD FOR ANALYSING A DEFECT OF A PHOTOLITHOGRAPHIC MAS...
- Publication number 20170292923
- Publication date Oct 12, 2017
- Carl Zeiss SMT GMBH
- Gabriel Baralia
- G02 - OPTICS
Information Patent Application
METHOD AND APPARATUS FOR AVOIDING DAMAGE WHEN ANALYSING A SAMPLE SU...
- Publication number 20170261532
- Publication date Sep 14, 2017
- Carl Zeiss SMT GMBH
- Hans Hermann Pieper
- G01 - MEASURING TESTING

Christof Baur

Person

Patents Grantslast 30 patents

Method and apparatuses for disposing of excess material of a photol...

Methods and devices for extending a time period until changing a me...

Device and method for operating a bending beam in a closed control...

Method and apparatus for removing a particle from a photolithograph...

Apparatus and method for removing a single particulate from a subst...

Method and apparatuses for disposing of excess material of a photol...

Apparatus and method for a scanning probe microscope

Device and method for analyzing a defect of a photolithographic mas...

Method and apparatus for examining a measuring tip of a scanning pr...

Device and method for operating a bending beam in a closed control...

Apparatus and method for examining and/or processing a sample

Method and apparatus for removing a particle from a photolithograph...

Methods and devices for extending a time period until changing a me...

Apparatus and method for examining and/or processing a sample

Apparatus and method for a scanning probe microscope

Method and apparatus for examining a measuring tip of a scanning pr...

Scanning probe microscope and method for increasing a scan speed of...

Device and method for analysing a defect of a photolithographic mas...

Probe system and method for receiving a probe of a scanning probe m...

Beam blanker and method for blanking a charged particle beam

Scanning probe microscope and method for examining a surface with a...

Method and apparatus for avoiding damage when analysing a sample su...

Scanning particle microscope and method for determining a position...

Apparatus and method for investigating an object

Apparatus and method for analyzing and modifying a specimen surface

Patents Applicationslast 30 patents

APPARATUS AND METHOD FOR REMOVING A SINGLE PARTICULATE FROM A SUBST...

METHODS AND DEVICES FOR EXTENDING A TIME PERIOD UNTIL CHANGING A ME...

DEVICE AND METHOD FOR OPERATING A BENDING BEAM IN A CLOSED CONTROL...

METHOD AND APPARATUS FOR REMOVING A PARTICLE FROM A PHOTOLITHOGRAPH...

METHOD AND APPARATUS FOR PROCESSING A SAMPLE

DEVICE AND METHOD FOR OPERATING A BENDING BEAM IN A CLOSED CONTROL...

METHOD AND DEVICE FOR DETERMINING AN ALIGNMENT OF A PHOTOMASK ON A...

METHOD AND APPARATUS FOR REMOVING A PARTICLE FROM A PHOTOLITHOGRAPH...

METHOD AND APPARATUSES FOR DISPOSING OF EXCESS MATERIAL OF A PHOTOL...

METHOD AND APPARATUSES FOR DISPOSING OF EXCESS MATERIAL OF A PHOTOL...

METHOD, DEVICE AND COMPUTER PROGRAM FOR REPAIRING A MASK DEFECT

METHOD AND APPARATUSES FOR DISPOSING OF EXCESS MATERIAL OF A PHOTOL...

METHODS AND DEVICES FOR EXTENDING A TIME PERIOD UNTIL CHANGING A ME...

APPARATUS AND METHOD FOR EXAMINING AND/OR PROCESSING A SAMPLE

APPARATUS AND METHOD FOR A SCANNING PROBE MICROSCOPE

METHOD AND APPARATUS FOR EXAMINING A MEASURING TIP OF A SCANNING PR...

DEVICE AND METHOD FOR OPERATING A BENDING BEAM IN A CLOSED CONTROL...

APPARATUS AND METHOD FOR REMOVING A SINGLE PARTICULATE FROM A SUBST...

DEVICE AND METHOD FOR ANALYSING A DEFECT OF A PHOTOLITHOGRAPHIC MAS...

APPARATUS AND METHOD FOR EXAMINING AND/OR PROCESSING A SAMPLE

METHOD AND APPARATUS FOR REMOVING A PARTICLE FROM A PHOTOLITHOGRAPH...

METHOD AND APPARATUS FOR EXAMINING A MEASURING TIP OF A SCANNING PR...

METHOD AND APPARATUSES FOR DISPOSING OF EXCESS MATERIAL OF A PHOTOL...

APPARATUS AND METHOD FOR A SCANNING PROBE MICROSCOPE

METHODS AND DEVICES FOR EXTENDING A TIME PERIOD UNTIL CHANGING A ME...

SCANNING PROBE MICROSCOPE AND METHOD FOR INCREASING A SCAN SPEED OF...

BEAM BLANKER AND METHOD FOR BLANKING A CHARGED PARTICLE BEAM

PROBE SYSTEM AND METHOD FOR RECEIVING A PROBE OF A SCANNING PROBE M...

DEVICE AND METHOD FOR ANALYSING A DEFECT OF A PHOTOLITHOGRAPHIC MAS...

METHOD AND APPARATUS FOR AVOIDING DAMAGE WHEN ANALYSING A SAMPLE SU...