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Christof Matthias Schilz
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Munchen, DE
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Patents Grants
last 30 patents
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Patent Grant
Method for producing phase shifter masks
Patent number
7,211,355
Issue date
May 1, 2007
Infineon Technologies AG
Christof Matthias Schilz
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for patterning a mask layer and semiconductor product
Patent number
7,078,135
Issue date
Jul 18, 2006
Infineon Technologies AG
Frank-Michael Kamm
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Method for Producing Phase Shifter Masks
Publication number
20070202419
Publication date
Aug 30, 2007
Christof Matthias Schilz
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for producing phase shifter masks
Publication number
20060037939
Publication date
Feb 23, 2006
Infineon Technologies AG
Christof Matthias Schilz
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and apparatus for producing phase shifter masks
Publication number
20050191561
Publication date
Sep 1, 2005
Christof Matthias Schilz
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for patterning a mask layer and semiconductor product
Publication number
20040081898
Publication date
Apr 29, 2004
Frank-Michael Kamm
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Protective device for lithographic masks and method of using lithog...
Publication number
20040067424
Publication date
Apr 8, 2004
Christof Matthias Schilz
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY