Christoph Fetzer

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Neu-Ulm, DE

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Patents Grantslast 30 patents

Information Patent Grant
Method for localizing assembly errors
- Patent number 11,175,595
- Issue date Nov 16, 2021
- Carl Zeiss SMT GmbH
- Thomas Niederhausen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method, measuring system and lithography apparatus
- Patent number 11,163,239
- Issue date Nov 2, 2021
- Carl Zeiss SMT GmbH
- Frank Treubel
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
METHOD, MEASURING SYSTEM AND LITHOGRAPHY APPARATUS
- Publication number 20210026252
- Publication date Jan 28, 2021
- Carl Zeiss SMT GMBH
- Frank Treubel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR LOCALIZING ASSEMBLY ERRORS
- Publication number 20200012197
- Publication date Jan 9, 2020
- Carl Zeiss SMT GMBH
- Thomas Niederhausen
- G06 - COMPUTING CALCULATING COUNTING