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Christoph Friedrich
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Munich, DE
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last 30 patents
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Patent Grant
Generating mask layout data for simulation of lithographic processes
Patent number
6,631,511
Issue date
Oct 7, 2003
Infineon Technologies AG
Henning Haffner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Generating mask layout data for simulation of lithographic processes
Publication number
20020083408
Publication date
Jun 27, 2002
Henning Haffner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY