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Christoph Haeusler
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Freital, DE
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last 30 patents
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Patent Grant
Method, control device and vacuum arrangement
Patent number
11,804,385
Issue date
Oct 31, 2023
VON ARDENNE Asset GmbH & Co. KG
Mirko Loehnert
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Substrate holding device, substrate transport device, processing ar...
Patent number
10,770,324
Issue date
Sep 8, 2020
VON ARDENNE Asset GmbH & Co. KG
Robert Kuenanz
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Method, Control Device and Vacuum Arrangement
Publication number
20210183664
Publication date
Jun 17, 2021
VON ARDENNE Asset GmbH & Co. KG
Mirko Loehnert
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE HOLDING DEVICE, SUBSTRATE TRANSPORT DEVICE, PROCESSING AR...
Publication number
20170323815
Publication date
Nov 9, 2017
VON ARDENNE GMBH
Robert Kuenanz
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...