Christoph Merkl

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Weidenweg, DE

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for determining measurement values
- Patent number 8,335,658
- Issue date Dec 18, 2012
- Mattson Technology, Inc.
- Christoph Merkl
- G05 - CONTROLLING REGULATING
Information Patent Grant
Calibration substrate and method of calibration therefor
- Patent number 8,282,272
- Issue date Oct 9, 2012
- Roland Schanz
- G01 - MEASURING TESTING
Information Patent Grant
Process for determining the temperature of a semiconductor wafer in...
- Patent number 7,412,299
- Issue date Aug 12, 2008
- Mattson Thermal Products GmbH
- Markus Hauf
- G01 - MEASURING TESTING
Information Patent Grant
Method of producing a calibration wafer
- Patent number 7,169,717
- Issue date Jan 30, 2007
- Mattson Thermal Products GmbH
- Christoph Merkl
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR DETERMINING MEASUREMENT VALUES
- Publication number 20110125443
- Publication date May 26, 2011
- Christoph Merkl
- G05 - CONTROLLING REGULATING
Information Patent Application
Calibration Substrate and Method of Calibration Therefor
- Publication number 20090122827
- Publication date May 14, 2009
- Roland Schanz
- G01 - MEASURING TESTING
Information Patent Application
Process for determining the temperature of a semiconductor wafer in...
- Publication number 20060100735
- Publication date May 11, 2006
- Markus Hauf
- G01 - MEASURING TESTING
Information Patent Application
Method of producing a calibration wafer
- Publication number 20060040478
- Publication date Feb 23, 2006
- Christoph Merkl
- G01 - MEASURING TESTING