Christoph Schenk

Follow

Person

Jena, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Aerostatic bearing arrangement and associated electrostatic preload...
- Patent number 8,529,130
- Issue date Sep 10, 2013
- Vistec Electron Beam GmbH
- Gerhard Schubert
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Aerostatically guided table system for vacuum application
- Patent number 8,496,221
- Issue date Jul 30, 2013
- Vistec Electron Beam GmbH
- Gerhard Schubert
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Table guided by aerostatic bearing elements for vacuum application
- Patent number 8,267,582
- Issue date Sep 18, 2012
- Vistec Electron Beam GmbH
- Gerhard Schubert
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electrostatic deflection system for corpuscular radiation
- Patent number 7,491,946
- Issue date Feb 17, 2009
- Leica Microsystems Lithography GmbH
- Stefan Risse
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING

Patents Applicationslast 30 patents

Information Patent Application
Aerostatically Guided Table System for Vacuum Application
- Publication number 20100122603
- Publication date May 20, 2010
- VISTEC ELECTRON BEAM GMBH
- Gerhard Schubert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
AEROSTATIC BEARING ARRANGEMENT AND ASSOCIATED ELECTROSTATIC PRELOAD...
- Publication number 20100061667
- Publication date Mar 11, 2010
- VISTEC ELECTRON BEAM GMBH
- Gerhard Schubert
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
TABLE GUIDED BY AEROSTATIC BEARING ELEMENTS FOR VACUUM APPLICATION
- Publication number 20090255447
- Publication date Oct 15, 2009
- VISTEC ELECTRON BEAM GMBH
- Gerhard Schubert
- B82 - NANO-TECHNOLOGY
Information Patent Application
Electrostatic deflection system for corpuscular radiation
- Publication number 20060192133
- Publication date Aug 31, 2006
- LEICA MICROSYSTEMS LITHOGRAPHY GmbH
- Stefan Risse
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING