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Christophe Constancias
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Grenoble, FR
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last 30 patents
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Patent Grant
Extreme ultraviolet photolithography mask, with resonant barrier layer
Patent number
7,842,438
Issue date
Nov 30, 2010
Commissariat a l'Energie Atomique
Christophe Constancias
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Extreme ultraviolet photolithography mask, with absorbent cavities
Patent number
7,781,128
Issue date
Aug 24, 2010
Commissariat a l'Energie Atomique
Christophe Constancias
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
EXTREME ULTRAVIOLET PHOTOLITHOGRAPHY MASK, WITH ABSORBENT CAVITIES
Publication number
20100178596
Publication date
Jul 15, 2010
Commissariat Al'energie Atomique
Christophe Constancias
B82 - NANO-TECHNOLOGY
Information
Patent Application
EXTREME ULTRAVIOLET PHOTOLITHOGRAPHY MASK, WITH RESONANT BARRIER LAYER
Publication number
20090305147
Publication date
Dec 10, 2009
COMMISSARIAT A L'ENERGIE ATOMIQUE
Christophe Constancias
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY