Christopher A. Bode

Person

Austin, TX, US

People

Patents Grantslast 30 patents

Information Patent Grant
Process control using analysis of an upstream process
- Patent number 8,615,314
- Issue date Dec 24, 2013
- Advanced Micro Devices, Inc.
- Thomas J. Sonderman
- G05 - CONTROLLING REGULATING
Information Patent Grant
Associating data with workpieces and correlating the data with yiel...
- Patent number 8,321,048
- Issue date Nov 27, 2012
- Advanced Micro Devices, Inc.
- Elfido Coss, Jr.
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and apparatus for predicting device electrical parameters du...
- Patent number 8,185,230
- Issue date May 22, 2012
- Advanced Micro Devices, Inc.
- Michael L. Miller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Controlling processing of semiconductor wafers based upon end of li...
- Patent number 7,797,073
- Issue date Sep 14, 2010
- Advanced Micro Devices, Inc.
- Alexander J. Pasadyn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for dynamic adjustment of a sensor sampling rate
- Patent number 7,558,687
- Issue date Jul 7, 2009
- Advanced Micro Devices, Inc.
- Christopher A. Bode
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and apparatus for integrating multiple sample plans
- Patent number 7,519,447
- Issue date Apr 14, 2009
- Advanced Micro Devices, Inc.
- Christopher A. Bode
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and apparatus for dynamic adjustment of sensor and/or metrol...
- Patent number 7,502,702
- Issue date Mar 10, 2009
- Advanced Micro Devices, Inc.
- Richard J. Markle
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for dynamic adjustment of a sampling plan base...
- Patent number 7,445,945
- Issue date Nov 4, 2008
- Advanced Micro Devices, Inc.
- Richard J. Markle
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Applying a self-adaptive filter to a drifting process
- Patent number 7,424,392
- Issue date Sep 9, 2008
- Advanced Micro Devices, Inc.
- Jin Wang
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Method and apparatus for fast disturbance detection and classification
- Patent number 7,299,154
- Issue date Nov 20, 2007
- Advanced Micro Devices, Inc.
- Qinghua He
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method for determining optimal photolithography overlay targets bas...
- Patent number 7,200,459
- Issue date Apr 3, 2007
- Advanced Micro Devices, Inc.
- Christopher Allen Bode
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Method and apparatus for performing field-to-field compensation
- Patent number 7,120,514
- Issue date Oct 10, 2006
- Advanced Micro Devices, Inc.
- Christopher A. Bode
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for initializing tool controllers based on too...
- Patent number 7,103,439
- Issue date Sep 5, 2006
- Advanced Micro Devices, Inc.
- Christopher A. Bode
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Controlling cumulative wafer effects
- Patent number 7,069,103
- Issue date Jun 27, 2006
- Advanced Micro Devices, Inc.
- Christopher A. Bode
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Method and apparatus for providing excitation for a process controller
- Patent number 7,020,535
- Issue date Mar 28, 2006
- Advanced Micro Devices, Inc.
- Christopher A. Bode
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Matching data related to multiple metrology tools
- Patent number 6,978,189
- Issue date Dec 20, 2005
- Advanced Micro Devices, Inc.
- Christopher A. Bode
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for updating control state variables of a proc...
- Patent number 6,970,757
- Issue date Nov 29, 2005
- Advanced Micro Devices, Inc.
- Joyce S. Oey Hewett
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Multi-level process data representation
- Patent number 6,957,120
- Issue date Oct 18, 2005
- Advanced Micro Devices, Inc.
- Christopher A. Bode
- G05 - CONTROLLING REGULATING
Information Patent Grant
Dispatch and/or disposition of material based upon an expected para...
- Patent number 6,947,803
- Issue date Sep 20, 2005
- Advanced Micro Devices, Inc.
- Christopher A. Bode
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for controlling process target values based on...
- Patent number 6,937,914
- Issue date Aug 30, 2005
- Advanced Micro Devices, Inc.
- Christopher A. Bode
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Prioritizing an application of correction in a multi-input control...
- Patent number 6,912,436
- Issue date Jun 28, 2005
- Advanced Micro Devices, Inc.
- Gary Jones
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and apparatus for distinguishing between sources of process...
- Patent number 6,901,340
- Issue date May 31, 2005
- Advanced Micro Devices, Inc.
- Alexander J. Pasadyn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for controlling photolithography overlay regis...
- Patent number 6,897,075
- Issue date May 24, 2005
- Advanced Micro Devices, Inc.
- Christopher A. Bode
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Updating process controller based upon fault detection analysis
- Patent number 6,871,114
- Issue date Mar 22, 2005
- Eric O. Green
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and apparatus for determining a sampling plan based on proce...
- Patent number 6,821,792
- Issue date Nov 23, 2004
- Advanced Micro Devices, Inc.
- Thomas J. Sonderman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tuning of a process control based upon layer dependencies
- Patent number 6,823,231
- Issue date Nov 23, 2004
- Advanced Micro Devices, Inc.
- Christopher A. Bode
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for overlay control using multiple targets
- Patent number 6,815,232
- Issue date Nov 9, 2004
- Advanced Micro Devices, Inc.
- Gary K Jones
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of using critical dimension measurements to control stepper...
- Patent number 6,808,946
- Issue date Oct 26, 2004
- Advanced Micro Devices, Inc.
- James Broc Stirton
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Correlating an inline parameter to a device operation parameter
- Patent number 6,810,296
- Issue date Oct 26, 2004
- Advanced Micro Devices, Inc.
- Christopher A. Bode
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for integrating multiple process controllers
- Patent number 6,801,817
- Issue date Oct 5, 2004
- Advanced Micro Devices, Inc.
- Christopher A. Bode
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...

Patents Applicationslast 30 patents

Information Patent Application
Method and system for calibrating integrated metrology systems and...
- Publication number 20060058979
- Publication date Mar 16, 2006
- Richard J. Markle
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for controlling photolithography overlay regis...
- Publication number 20040159397
- Publication date Aug 19, 2004
- Advanced Micro Devices, Inc.
- Christopher A. Bode
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for overlay control using multiple targets
- Publication number 20040101983
- Publication date May 27, 2004
- Gary K. Jones
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Correlating an inline parameter to a device operation parameter
- Publication number 20040059456
- Publication date Mar 25, 2004
- Christopher A. Bode
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for predicting device electrical parameters du...
- Publication number 20040040001
- Publication date Feb 26, 2004
- Michael L. Miller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for utilizing integrated metrology data as fee...
- Publication number 20030097198
- Publication date May 22, 2003
- Thomas J. Sonderman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for cascade control using integrated metrology
- Publication number 20030082837
- Publication date May 1, 2003
- Alexander J. Pasadyn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for controlling feature critical dimensions ba...
- Publication number 20020177245
- Publication date Nov 28, 2002
- Thomas J. Sonderman
- G01 - MEASURING TESTING
Information Patent Application
Method of varying stepper exposure dose to compensate for across-wa...
- Publication number 20020106821
- Publication date Aug 8, 2002
- Christopher A. Bode
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Christopher A. Bode

Person

Patents Grantslast 30 patents

Process control using analysis of an upstream process

Associating data with workpieces and correlating the data with yiel...

Method and apparatus for predicting device electrical parameters du...

Controlling processing of semiconductor wafers based upon end of li...

Method and apparatus for dynamic adjustment of a sensor sampling rate

Method and apparatus for integrating multiple sample plans

Method and apparatus for dynamic adjustment of sensor and/or metrol...

Method and apparatus for dynamic adjustment of a sampling plan base...

Applying a self-adaptive filter to a drifting process

Method and apparatus for fast disturbance detection and classification

Method for determining optimal photolithography overlay targets bas...

Method and apparatus for performing field-to-field compensation

Method and apparatus for initializing tool controllers based on too...

Controlling cumulative wafer effects

Method and apparatus for providing excitation for a process controller

Matching data related to multiple metrology tools

Method and apparatus for updating control state variables of a proc...

Multi-level process data representation

Dispatch and/or disposition of material based upon an expected para...

Method and apparatus for controlling process target values based on...

Prioritizing an application of correction in a multi-input control...

Method and apparatus for distinguishing between sources of process...

Method and apparatus for controlling photolithography overlay regis...

Updating process controller based upon fault detection analysis

Method and apparatus for determining a sampling plan based on proce...

Tuning of a process control based upon layer dependencies

Method and apparatus for overlay control using multiple targets

Method of using critical dimension measurements to control stepper...

Correlating an inline parameter to a device operation parameter

Method and apparatus for integrating multiple process controllers

Patents Applicationslast 30 patents

Method and system for calibrating integrated metrology systems and...

Method and apparatus for controlling photolithography overlay regis...

Method and apparatus for overlay control using multiple targets

Correlating an inline parameter to a device operation parameter

Method and apparatus for predicting device electrical parameters du...

Method and apparatus for utilizing integrated metrology data as fee...

Method and apparatus for cascade control using integrated metrology

Method and apparatus for controlling feature critical dimensions ba...

Method of varying stepper exposure dose to compensate for across-wa...