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Christopher A. Luebker
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Coppell, TX, US
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last 30 patents
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Patent Grant
Wafer boat and boat holder
Patent number
6,669,253
Issue date
Dec 30, 2003
David W. Benzing
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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last 30 patents
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Patent Application
Wafer boat and boat holder
Publication number
20020076316
Publication date
Jun 20, 2002
David W. Benzing
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...