Christopher Campbell

Person

Newburyport, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate halo arrangement for improved process uniformity
- Patent number 12,106,943
- Issue date Oct 1, 2024
- Applied Materials, Inc.
- Jay R. Wallace
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and system including high angle extraction optics
- Patent number 11,948,781
- Issue date Apr 2, 2024
- Applied Materials, Inc.
- Christopher Campbell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Real time photoresist outgassing control system and method
- Patent number 11,749,500
- Issue date Sep 5, 2023
- Applied Materials, Inc.
- Nevin Clay
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and system including high angle extraction optics
- Patent number 11,361,935
- Issue date Jun 14, 2022
- Applied Materials, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and system having extraction assembly for wide angle ion...
- Patent number 11,056,319
- Issue date Jul 6, 2021
- Applied Materials, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High-current ion implanter and method for controlling ion beam usin...
- Patent number 11,011,343
- Issue date May 18, 2021
- Applied Materials, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for differential in situ cleaning
- Patent number 10,730,082
- Issue date Aug 4, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Glen F R Gilchrist
- B08 - CLEANING
Information Patent Grant
Conductive beam optics for reducing particles in ion implanter
- Patent number 10,714,301
- Issue date Jul 14, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Shengwu Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and techniques to treat substrates using directional plas...
- Patent number 10,600,616
- Issue date Mar 24, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Shurong Liang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Conductive beam optic containing internal heating element
- Patent number 10,504,682
- Issue date Dec 10, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Shengwu Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low particle capacitively coupled components for workpiece processing
- Patent number 10,276,340
- Issue date Apr 30, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Morgan D. Evans
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Radio frequency extraction system for charge neutralized ion beam
- Patent number 10,224,181
- Issue date Mar 5, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and techniques to treat substrates using directional plas...
- Patent number 10,128,082
- Issue date Nov 13, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Shurong Liang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and techniques to treat substrates using directional plas...
- Patent number 10,004,133
- Issue date Jun 19, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Shurong Liang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and techniques to treat substrates using directional plas...
- Patent number 9,706,634
- Issue date Jul 11, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Shurong Liang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Control of ion angular distribution of ion beams with hidden deflec...
- Patent number 9,514,912
- Issue date Dec 6, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source and a method for in-situ cleaning thereof
- Patent number 9,142,379
- Issue date Sep 22, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for treating sidewalls of patterned structures using ang...
- Patent number 9,118,001
- Issue date Aug 25, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Ludovic Godet
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus to control an ion beam
- Patent number 9,029,811
- Issue date May 12, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Kenneth H. Purser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual stage scanner for ion beam control
- Patent number 8,993,980
- Issue date Mar 31, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Kenneth H. Purser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for plasma control using boundary electrode
- Patent number 8,907,300
- Issue date Dec 9, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Svetlana B. Radovanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual mode ion implanter
- Patent number 8,884,244
- Issue date Nov 11, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Kenneth H. Purser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source and a method for in-situ cleaning thereof
- Patent number 8,809,800
- Issue date Aug 19, 2014
- Varian Semicoductor Equipment Associates, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Directional gas injection for an ion source cathode assembly
- Patent number 8,263,944
- Issue date Sep 11, 2012
- Varian Semiconductor Equipment Associates, Inc.
- John Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas delivery system for an ion source
- Patent number 8,003,954
- Issue date Aug 23, 2011
- Varian Semiconductor Equipment Associates, Inc.
- John Slocum
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for providing ion source feed materials
- Patent number 7,655,932
- Issue date Feb 2, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Christopher R. Hatem
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion implantation with a collimator magnet and a neutral filter magnet
- Patent number 7,579,602
- Issue date Aug 25, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Victor M. Benveniste
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ION EXTRACTION OPTICS FOR ION PROCESSING SYSTEM
- Publication number 20250232942
- Publication date Jul 17, 2025
- Applied Materials, Inc.
- Costel BILOIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION EXTRACTION OPTICS HAVING NON UNIFORM GRID ASSEMBLY
- Publication number 20240412956
- Publication date Dec 12, 2024
- Applied Materials, Inc.
- Costel BILOIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION EXTRACTION OPTICS HAVING NOVEL BLOCKER CONFIGURATION
- Publication number 20240194438
- Publication date Jun 13, 2024
- Applied Materials, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REAL TIME PHOTORESIST OUTGASSING CONTROL SYSTEM AND METHOD
- Publication number 20230238214
- Publication date Jul 27, 2023
- Applied Materials, Inc.
- Nevin Clay
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HALO ARRANGEMENT FOR IMPROVED PROCESS UNIFORMITY
- Publication number 20220384156
- Publication date Dec 1, 2022
- Applied Materials, Inc.
- Jay R. Wallace
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND SYSTEM INCLUDING HIGH ANGLE EXTRACTION OPTICS
- Publication number 20220148843
- Publication date May 12, 2022
- Applied Materials, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND SYSTEM INCLUDING HIGH ANGLE EXTRACTION OPTICS
- Publication number 20210391155
- Publication date Dec 16, 2021
- Applied Materials, Inc.
- Christopher Campbell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND SYSTEM HAVING EXTRACTION ASSEMBLY FOR WIDE ANGLE ION...
- Publication number 20210035779
- Publication date Feb 4, 2021
- Applied Materials, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH-CURRENT ION IMPLANTER AND METHOD FOR CONTROLLING ION BEAM USIN...
- Publication number 20210020399
- Publication date Jan 21, 2021
- Applied Materials, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HALO ARRANGEMENT FOR IMPROVED PROCESS UNIFORMITY
- Publication number 20190272983
- Publication date Sep 5, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Jay Wallace
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONDUCTIVE BEAM OPTIC CONTAINING INTERNAL HEATING ELEMENT
- Publication number 20190259560
- Publication date Aug 22, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Shengwu Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND TECHNIQUES TO TREAT SUBSTRATES USING DIRECTIONAL PLAS...
- Publication number 20190006149
- Publication date Jan 3, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Shurong Liang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus And Method For Differential In Situ Cleaning
- Publication number 20180111171
- Publication date Apr 26, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Glen FR Gilchrist
- B08 - CLEANING
Information Patent Application
APPARATUS AND TECHNIQUES TO TREAT SUBSTRATES USING DIRECTIONAL PLAS...
- Publication number 20170311430
- Publication date Oct 26, 2017
- Shurong Liang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RADIO FREQUENCY EXTRACTION SYSTEM FOR CHARGE NEUTRALIZED ION BEAM
- Publication number 20170309453
- Publication date Oct 26, 2017
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND TECHNIQUES TO TREAT SUBSTRATES USING DIRECTIONAL PLAS...
- Publication number 20170042010
- Publication date Feb 9, 2017
- Shurong Liang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND TECHNIQUES TO TREAT SUBSTRATES USING DIRECTIONAL PLAS...
- Publication number 20170025252
- Publication date Jan 26, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Shurong Liang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTROL OF ION ANGULAR DISTRIBUTION OF ION BEAMS WITH HIDDEN DEFLEC...
- Publication number 20160071693
- Publication date Mar 10, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Costel Biloiu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DUAL STAGE SCANNER FOR ION BEAM CONTROL
- Publication number 20150108361
- Publication date Apr 23, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Kenneth H. Purser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS TO CONTROL AN ION BEAM
- Publication number 20150108362
- Publication date Apr 23, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Kenneth H. Purser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion source and a method for in-situ cleaning thereof
- Publication number 20140319369
- Publication date Oct 30, 2014
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR PLASMA CONTROL USING BOUNDARY ELECTRODE
- Publication number 20140265853
- Publication date Sep 18, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Svetlana B. Radovanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR TREATING SIDEWALLS OF PATTERNED STRUCTURES USING ANG...
- Publication number 20140017817
- Publication date Jan 16, 2014
- Ludovic Godet
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIRECTIONAL GAS INJECTION FOR AN ION SOURCE CATHODE ASSEMBLY
- Publication number 20100155619
- Publication date Jun 24, 2010
- Varian Semiconductor Equipment Associates Inc.
- John Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion Source and a Method for In-Situ Cleaning Thereof
- Publication number 20100024841
- Publication date Feb 4, 2010
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS DELIVERY SYSTEM FOR AN ION SOURCE
- Publication number 20090289197
- Publication date Nov 26, 2009
- Varian Semiconductor Equipment Associates, Inc.
- John SLOCUM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR PROVIDING ION SOURCE FEED MATERIALS
- Publication number 20080169427
- Publication date Jul 17, 2008
- Varian Semiconductor Equipment Associates, Inc.
- Christopher R. HATEM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION IMPLANTATION WITH A COLLIMATOR MAGNET AND A NEUTRAL FILTER MAGNET
- Publication number 20080149845
- Publication date Jun 26, 2008
- Victor M. Benveniste
- H01 - BASIC ELECTRIC ELEMENTS

Christopher Campbell

Person

Patents Grantslast 30 patents

Substrate halo arrangement for improved process uniformity

Apparatus and system including high angle extraction optics

Real time photoresist outgassing control system and method

Apparatus and system including high angle extraction optics

Apparatus and system having extraction assembly for wide angle ion...

High-current ion implanter and method for controlling ion beam usin...

Apparatus and method for differential in situ cleaning

Conductive beam optics for reducing particles in ion implanter

Apparatus and techniques to treat substrates using directional plas...

Conductive beam optic containing internal heating element

Low particle capacitively coupled components for workpiece processing

Radio frequency extraction system for charge neutralized ion beam

Apparatus and techniques to treat substrates using directional plas...

Apparatus and techniques to treat substrates using directional plas...

Apparatus and techniques to treat substrates using directional plas...

Control of ion angular distribution of ion beams with hidden deflec...

Ion source and a method for in-situ cleaning thereof

Techniques for treating sidewalls of patterned structures using ang...

Apparatus to control an ion beam

Dual stage scanner for ion beam control

System and method for plasma control using boundary electrode

Dual mode ion implanter

Ion source and a method for in-situ cleaning thereof

Directional gas injection for an ion source cathode assembly

Gas delivery system for an ion source

Techniques for providing ion source feed materials

Ion implantation with a collimator magnet and a neutral filter magnet

Patents Applicationslast 30 patents

ION EXTRACTION OPTICS FOR ION PROCESSING SYSTEM

ION EXTRACTION OPTICS HAVING NON UNIFORM GRID ASSEMBLY

ION EXTRACTION OPTICS HAVING NOVEL BLOCKER CONFIGURATION

REAL TIME PHOTORESIST OUTGASSING CONTROL SYSTEM AND METHOD

SUBSTRATE HALO ARRANGEMENT FOR IMPROVED PROCESS UNIFORMITY

APPARATUS AND SYSTEM INCLUDING HIGH ANGLE EXTRACTION OPTICS

APPARATUS AND SYSTEM INCLUDING HIGH ANGLE EXTRACTION OPTICS

APPARATUS AND SYSTEM HAVING EXTRACTION ASSEMBLY FOR WIDE ANGLE ION...

HIGH-CURRENT ION IMPLANTER AND METHOD FOR CONTROLLING ION BEAM USIN...

SUBSTRATE HALO ARRANGEMENT FOR IMPROVED PROCESS UNIFORMITY

CONDUCTIVE BEAM OPTIC CONTAINING INTERNAL HEATING ELEMENT

APPARATUS AND TECHNIQUES TO TREAT SUBSTRATES USING DIRECTIONAL PLAS...

Apparatus And Method For Differential In Situ Cleaning

APPARATUS AND TECHNIQUES TO TREAT SUBSTRATES USING DIRECTIONAL PLAS...

RADIO FREQUENCY EXTRACTION SYSTEM FOR CHARGE NEUTRALIZED ION BEAM

APPARATUS AND TECHNIQUES TO TREAT SUBSTRATES USING DIRECTIONAL PLAS...

APPARATUS AND TECHNIQUES TO TREAT SUBSTRATES USING DIRECTIONAL PLAS...

CONTROL OF ION ANGULAR DISTRIBUTION OF ION BEAMS WITH HIDDEN DEFLEC...

DUAL STAGE SCANNER FOR ION BEAM CONTROL

APPARATUS TO CONTROL AN ION BEAM

Ion source and a method for in-situ cleaning thereof

SYSTEM AND METHOD FOR PLASMA CONTROL USING BOUNDARY ELECTRODE

TECHNIQUES FOR TREATING SIDEWALLS OF PATTERNED STRUCTURES USING ANG...

DIRECTIONAL GAS INJECTION FOR AN ION SOURCE CATHODE ASSEMBLY

Ion Source and a Method for In-Situ Cleaning Thereof

GAS DELIVERY SYSTEM FOR AN ION SOURCE

TECHNIQUES FOR PROVIDING ION SOURCE FEED MATERIALS

ION IMPLANTATION WITH A COLLIMATOR MAGNET AND A NEUTRAL FILTER MAGNET