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Christopher Charles Griffin
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Milpitas, CA, US
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last 30 patents
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Patent Grant
Alternate gas delivery and evacuation system for plasma processing...
Patent number
8,202,393
Issue date
Jun 19, 2012
Lam Research Corporation
Harry P. Wong
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Shape memory alloy lift pins for semiconductor processing equipment
Patent number
5,669,977
Issue date
Sep 23, 1997
Lam Research Corporation
Paul Kevin Shufflebotham
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Alternate gas delivery and evacuation system for plasma processing...
Publication number
20090061640
Publication date
Mar 5, 2009
LAM RESEARCH CORPORATION
Harry P. Wong
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...