Christopher Charles WARD

Person

Somerville, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Lithographic apparatus
- Patent number 10,788,763
- Issue date Sep 29, 2020
- ASML Netherlands B.V.
- Jan Steven Christiaan Westerlaken
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Patterning device cooling apparatus
- Patent number 10,642,166
- Issue date May 5, 2020
- ASML Holding N.V.
- Güneş Nakiboglu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reticle cooling by non-uniform gas flow
- Patent number 10,423,081
- Issue date Sep 24, 2019
- ASML Holding N.V.
- Thomas Venturino
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Patterning device cooling apparatus
- Patent number 10,394,139
- Issue date Aug 27, 2019
- ASML Holding N.V.
- Güneş Nakiboglu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Patterning device cooling systems in a lithographic apparatus
- Patent number 10,281,830
- Issue date May 7, 2019
- ASML Netherlands B.V.
- Laurentius Johannes Adrianus Van Bokhoven
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Gas flow optimization in reticle stage environment
- Patent number 10,031,428
- Issue date Jul 24, 2018
- ASML Netherlands B.V.
- Koen Cuypers
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Patterning device support, lithographic apparatus, and method of co...
- Patent number 9,977,351
- Issue date May 22, 2018
- ASML Holding N.V.
- Earl William Ebert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Patterning device manipulating system and lithographic apparatuses
- Patent number 9,910,368
- Issue date Mar 6, 2018
- ASML Netherlands B.V.
- Christiaan Louis Valentin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Estimating deformation of a patterning device and/or a change in it...
- Patent number 9,857,694
- Issue date Jan 2, 2018
- ASML Netherlands B.V.
- Bearrach Moest
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Patterning device support, lithographic apparatus, and method of co...
- Patent number 9,766,557
- Issue date Sep 19, 2017
- ASML Holding N.V.
- Earl William Ebert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Patterning device support and lithographic apparatus
- Patent number 9,740,112
- Issue date Aug 22, 2017
- ASML Holding N.V.
- Arindam Sinharoy
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reticle cooling system in a lithographic apparatus
- Patent number 9,632,434
- Issue date Apr 25, 2017
- ASML Holding N.V.
- Earl William Ebert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Real-time reticle curvature sensing
- Patent number 9,632,429
- Issue date Apr 25, 2017
- ASML Holding N.V.
- Christopher Charles Ward
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Patterning device support, lithographic apparatus, and method of co...
- Patent number 9,632,433
- Issue date Apr 25, 2017
- ASML Holding N.V.
- Earl William Ebert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus
- Patent number 9,513,568
- Issue date Dec 6, 2016
- ASML Netherlands B.V.
- Jan Steven Christiaan Westerlaken
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatuses and methods for compensating for eigenmode...
- Patent number 9,329,502
- Issue date May 3, 2016
- ASML Holding N.V.
- Christopher Charles Ward
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...

Patents Applicationslast 30 patents

Information Patent Application
PATTERNING DEVICE COOLING APPARATUS
- Publication number 20190346777
- Publication date Nov 14, 2019
- ASML NETHERLANDS B.V.
- Günes NAKIBOGLU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PATTERNING DEVICE COOLING APPARATUS
- Publication number 20190121248
- Publication date Apr 25, 2019
- ASML NETHERLANDS B.V.
- Günes NAKIBOGLU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PATTERNING DEVICE COOLING SYSTEMS IN A LITHOGRAPHIC APPARATUS
- Publication number 20180196360
- Publication date Jul 12, 2018
- ASML NETHERLANDS B.V.
- Laurentius Johannes Adrianus VAN BOKHOVEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Reticle Cooling by Non-Uniform Gas Flow
- Publication number 20170363973
- Publication date Dec 21, 2017
- ASML Holding N.V.
- Thomas VENTURINO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Patterning Device Support, Lithographic Apparatus, And Method Of Co...
- Publication number 20170307986
- Publication date Oct 26, 2017
- ASML Holding N.V.
- Earl William EBERT
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Patterning Device Support, Lithographic Apparatus, And Method Of Co...
- Publication number 20170160652
- Publication date Jun 8, 2017
- ASML Holding N.V.
- Earl William EBERT
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Estimating Deformation of a Patterning Device and/or a Change in It...
- Publication number 20170068171
- Publication date Mar 9, 2017
- ASML NETHERLANDS B.V.
- Bearrach MOEST
- G01 - MEASURING TESTING
Information Patent Application
LITHOGRAPHIC APPARATUS
- Publication number 20170068175
- Publication date Mar 9, 2017
- ASML NETHERLANDS B.V.
- Jan Steven Christiaan Westerlaken
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Gas Flow Optimization in Reticle Stage Environment
- Publication number 20150355557
- Publication date Dec 10, 2015
- ASML NETHERLANDS B.V.
- Koen CUYPERS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Patterning Device Support, Lithographic Apparatus, And Method Of Co...
- Publication number 20150301456
- Publication date Oct 22, 2015
- ASML Holding N.V.
- Earl William EBERT
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Patterning Device Support and Lithographic Apparatus
- Publication number 20150277240
- Publication date Oct 1, 2015
- ASML Holding N.V.
- Arindam Sinharoy
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Patterning Device Manipulating System and Lithographic Apparatuses
- Publication number 20150277241
- Publication date Oct 1, 2015
- ASML NETHERLANDS B.V.
- Christiaan Louis Valentin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Reticle Cooling System In A Lithographic Apparatus
- Publication number 20150241796
- Publication date Aug 27, 2015
- ASML Holding N.V.
- Earl William EBERT
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Real-Time Reticle Curvature Sensing
- Publication number 20150220005
- Publication date Aug 6, 2015
- ASML Holding N.V.
- Christopher Charles Ward
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Heating and Cooling Systems in a Lithographic Apparatus
- Publication number 20150192856
- Publication date Jul 9, 2015
- ASML NETHERLANDS B.V.
- Johannes Onvlee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS
- Publication number 20150168854
- Publication date Jun 18, 2015
- ASML NETHERLANDS B.V.
- Jan Steven Christiaan Westerlaken
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic Apparatuses and Methods for Compensating For Eigenmode...
- Publication number 20130278915
- Publication date Oct 24, 2013
- ASML NETHERLANDS B.V.
- Christopher Charles WARD
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Christopher Charles WARD

Person

Patents Grantslast 30 patents

Lithographic apparatus

Patterning device cooling apparatus

Reticle cooling by non-uniform gas flow

Patterning device cooling apparatus

Patterning device cooling systems in a lithographic apparatus

Gas flow optimization in reticle stage environment

Patterning device support, lithographic apparatus, and method of co...

Patterning device manipulating system and lithographic apparatuses

Estimating deformation of a patterning device and/or a change in it...

Patterning device support, lithographic apparatus, and method of co...

Patterning device support and lithographic apparatus

Reticle cooling system in a lithographic apparatus

Real-time reticle curvature sensing

Patterning device support, lithographic apparatus, and method of co...

Lithographic apparatus

Lithographic apparatuses and methods for compensating for eigenmode...

Patents Applicationslast 30 patents

PATTERNING DEVICE COOLING APPARATUS

PATTERNING DEVICE COOLING APPARATUS

PATTERNING DEVICE COOLING SYSTEMS IN A LITHOGRAPHIC APPARATUS

Reticle Cooling by Non-Uniform Gas Flow

Patterning Device Support, Lithographic Apparatus, And Method Of Co...

Patterning Device Support, Lithographic Apparatus, And Method Of Co...

Estimating Deformation of a Patterning Device and/or a Change in It...

LITHOGRAPHIC APPARATUS

Gas Flow Optimization in Reticle Stage Environment

Patterning Device Support, Lithographic Apparatus, And Method Of Co...

Patterning Device Support and Lithographic Apparatus

Patterning Device Manipulating System and Lithographic Apparatuses

Reticle Cooling System In A Lithographic Apparatus

Real-Time Reticle Curvature Sensing

Heating and Cooling Systems in a Lithographic Apparatus

LITHOGRAPHIC APPARATUS

Lithographic Apparatuses and Methods for Compensating For Eigenmode...