Christopher Godfrey

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Rowley, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Closed loop dose control for ion implantation
- Patent number 7,557,363
- Issue date Jul 7, 2009
- Axcelis Technologies, Inc.
- Yongzhang Huang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Closed loop dose control for ion implantation
- Publication number 20070278427
- Publication date Dec 6, 2007
- Axcelis Technologies, Inc.
- Yongzhang Huang
- H01 - BASIC ELECTRIC ELEMENTS