Christopher J. Rau

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Milpitas, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Chemical vapor deposition system including dedicated cleaning gas i...
- Patent number 6,200,412
- Issue date Mar 13, 2001
- Novellus Systems, Inc.
- Michael D. Kilgore
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
HEATER DESIGN SOLUTIONS FOR CHEMICAL DELIVERY SYSTEMS
- Publication number 20230175128
- Publication date Jun 8, 2023
- LAM RESEARCH CORPORATION
- Davinder Sharma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...