Christopher K. Olsen

Person

Peabody, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for beam deflection in a gas cluster ion beam...
- Patent number 9,540,725
- Issue date Jan 10, 2017
- TEL Epion Inc.
- Kenneth Regan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas cluster ion beam etching process for etching Si-containing, Ge-...
- Patent number 9,324,567
- Issue date Apr 26, 2016
- TEL Epion Inc.
- Martin D. Tabat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas cluster ion beam process for opening conformal layer in a high...
- Patent number 8,728,947
- Issue date May 20, 2014
- TEL Epion Inc.
- Christopher K. Olsen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas cluster ion beam process for opening conformal layer in a high...
- Patent number 8,722,542
- Issue date May 13, 2014
- TEL Epion Inc.
- Christopher K. Olsen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas cluster ion beam etching process for metal-containing materials
- Patent number 8,557,710
- Issue date Oct 15, 2013
- TEL Epion Inc.
- Yan Shao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas cluster ion beam etching process for Si-containing and Ge-conta...
- Patent number 8,513,138
- Issue date Aug 20, 2013
- TEL Epion Inc.
- Yan Shao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas cluster ion beam etching process for achieving target etch proc...
- Patent number 8,512,586
- Issue date Aug 20, 2013
- TEL Epion Inc.
- Martin D. Tabat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR BEAM DEFLECTION IN A GAS CLUSTER ION BEAM...
- Publication number 20150332924
- Publication date Nov 19, 2015
- TEL Epion Inc.
- Kenneth Regan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS CLUSTER ION BEAM ETCHING PROCESS
- Publication number 20150270135
- Publication date Sep 24, 2015
- TEL Epion Inc.
- Martin D. Tabat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Gas Cluster Ion Beam Process for Opening Conformal Layer in a High...
- Publication number 20130330924
- Publication date Dec 12, 2013
- TEL EPION, INC.
- Christopher OLSEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS CLUSTER ION BEAM PROCESS FOR OPENING CONFORMAL LAYER IN A HIGH...
- Publication number 20130330845
- Publication date Dec 12, 2013
- TEL Epion Inc.
- Christopher K. Olsen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS CLUSTER ION BEAM ETCHING PROCESS FOR ACHIEVING TARGET ETCH PROC...
- Publication number 20130309872
- Publication date Nov 21, 2013
- TEL Epion Inc.
- Martin D. Tabat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Gas Cluster Ion Beam Etching Process for Etching Si-Containing, Ge-...
- Publication number 20130196509
- Publication date Aug 1, 2013
- TEL Epion Inc.
- Martin D. Tabat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS CLUSTER ION BEAM ETCHING PROCESS FOR METAL-CONTAINING MATERIALS
- Publication number 20130059444
- Publication date Mar 7, 2013
- TEL EPION, INC.
- Yan SHAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS CLUSTER ION BEAM ETCHING PROCESS FOR Si-CONTAINING and Ge-CONTA...
- Publication number 20130059445
- Publication date Mar 7, 2013
- TEL EPION, INC.
- Yan SHAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS CLUSTER ION BEAM ETCHING PROCESS FOR ACHIEVING TARGET ETCH PROC...
- Publication number 20130059446
- Publication date Mar 7, 2013
- TEL EPION, INC.
- Martin D. TABAT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Christopher K. Olsen

Person

Patents Grantslast 30 patents

Method and apparatus for beam deflection in a gas cluster ion beam...

Gas cluster ion beam etching process for etching Si-containing, Ge-...

Gas cluster ion beam process for opening conformal layer in a high...

Gas cluster ion beam process for opening conformal layer in a high...

Gas cluster ion beam etching process for metal-containing materials

Gas cluster ion beam etching process for Si-containing and Ge-conta...

Gas cluster ion beam etching process for achieving target etch proc...

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR BEAM DEFLECTION IN A GAS CLUSTER ION BEAM...

GAS CLUSTER ION BEAM ETCHING PROCESS

Gas Cluster Ion Beam Process for Opening Conformal Layer in a High...

GAS CLUSTER ION BEAM PROCESS FOR OPENING CONFORMAL LAYER IN A HIGH...

GAS CLUSTER ION BEAM ETCHING PROCESS FOR ACHIEVING TARGET ETCH PROC...

Gas Cluster Ion Beam Etching Process for Etching Si-Containing, Ge-...

GAS CLUSTER ION BEAM ETCHING PROCESS FOR METAL-CONTAINING MATERIALS

GAS CLUSTER ION BEAM ETCHING PROCESS FOR Si-CONTAINING and Ge-CONTA...

GAS CLUSTER ION BEAM ETCHING PROCESS FOR ACHIEVING TARGET ETCH PROC...