Christopher R. Fairley

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Confocal wafer inspection system and method
- Patent number 7,858,911
- Issue date Dec 28, 2010
- KLA-Tencor Corporation
- Christopher R. Fairley
- G01 - MEASURING TESTING
Information Patent Grant
High throughput brightfield/darkfield water inspection system using...
- Patent number 7,554,655
- Issue date Jun 30, 2009
- KLA-Tencor Corporation
- Christopher R. Fairley
- G01 - MEASURING TESTING
Information Patent Grant
High throughput darkfield/brightfield wafer inspection system using...
- Patent number 7,522,275
- Issue date Apr 21, 2009
- KLA-Tencor Corporation
- Christopher R. Fairley
- G01 - MEASURING TESTING
Information Patent Grant
Confocal wafer inspection method and apparatus using fly lens arran...
- Patent number 7,399,950
- Issue date Jul 15, 2008
- KLA-Tencor Corporation
- Christopher R. Fairley
- G01 - MEASURING TESTING
Information Patent Grant
High throughput brightfield/darkfield wafer inspection system using...
- Patent number 7,379,173
- Issue date May 27, 2008
- KLA-Tencor Corporation
- Christopher R. Fairley
- G01 - MEASURING TESTING
Information Patent Grant
High throughput darkfield/brightfield wafer inspection system using...
- Patent number 7,259,844
- Issue date Aug 21, 2007
- KLA-Tencor Corporation
- Christopher R. Fairley
- G01 - MEASURING TESTING
Information Patent Grant
High throughput brightfield/darkfield wafer inspection system using...
- Patent number 7,164,475
- Issue date Jan 16, 2007
- KLA-Tencor Technologies Corporation
- Christopher R Fairley
- G01 - MEASURING TESTING
Information Patent Grant
Confocal wafer depth scanning inspection method
- Patent number 7,109,458
- Issue date Sep 19, 2006
- KLA-Tencor Corporation
- Christopher R. Fairley
- G01 - MEASURING TESTING
Information Patent Grant
Confocal wafer inspection method and apparatus using fly lens arran...
- Patent number 6,867,406
- Issue date Mar 15, 2005
- KLA-Tencor Corporation
- Christopher R. Fairley
- G01 - MEASURING TESTING
Information Patent Grant
High throughput brightfield/darkfield wafer inspection system using...
- Patent number 6,816,249
- Issue date Nov 9, 2004
- KLA-Tencor Corporation
- Christopher R Fairley
- G01 - MEASURING TESTING
Information Patent Grant
High throughput brightfield/darkfield wafer inspection system using...
- Patent number 6,288,780
- Issue date Sep 11, 2001
- KLA-Tencor Technologies Corp.
- Christopher R Fairley
- G01 - MEASURING TESTING
Information Patent Grant
Laser imaging system for inspection and analysis of sub-micron part...
- Patent number 5,963,314
- Issue date Oct 5, 1999
- Ultrapointe Corporation
- Bruce W. Worster
- G02 - OPTICS
Information Patent Grant
Method and apparatus for automatically focusing a microscope
- Patent number 5,783,814
- Issue date Jul 21, 1998
- Ultrapointe Corporation
- Christopher R. Fairley
- G02 - OPTICS
Information Patent Grant
Method and apparatus for automatic focusing of a confocal laser mic...
- Patent number 5,672,861
- Issue date Sep 30, 1997
- Ultrapointe Corporation
- Christopher R. Fairley
- G02 - OPTICS
Information Patent Grant
Method and structure for generating a surface image of a three dime...
- Patent number 5,557,113
- Issue date Sep 17, 1996
- Ultrapointe Corp.
- Abigail A. Moorhouse
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Laser imaging system for inspection and analysis of sub-micron part...
- Patent number 5,479,252
- Issue date Dec 26, 1995
- Ultrapointe Corporation
- Bruce W. Worster
- G02 - OPTICS
Information Patent Grant
Phase measurement system using a dithered clock
- Patent number 5,019,786
- Issue date May 28, 1991
- The United States of America as represented by the United States Department o...
- Christopher R. Fairley
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Confocal wafer inspection system and method
- Publication number 20080273196
- Publication date Nov 6, 2008
- KLA-Tencor Corporation
- Christopher R. Fairley
- G02 - OPTICS
Information Patent Application
High throughput brightfield/darkfield water inspection system using...
- Publication number 20080225298
- Publication date Sep 18, 2008
- KLA-Tencor Corporation
- Christopher R. Fairley
- G01 - MEASURING TESTING
Information Patent Application
High throughput darkfield/brightfield wafer inspection system using...
- Publication number 20080007726
- Publication date Jan 10, 2008
- KLA-Tencor Corporation
- Christopher R. Fairley
- G01 - MEASURING TESTING
Information Patent Application
High throughput darkfield/brightfield wafer inspection system using...
- Publication number 20070115461
- Publication date May 24, 2007
- KLA-Tencor Corporation
- Christopher R. Fairley
- G01 - MEASURING TESTING
Information Patent Application
Confocal wafer inspection method and apparatus using fly lens arran...
- Publication number 20070007429
- Publication date Jan 11, 2007
- KLA-Tencor Corporation
- Christopher R. Fairley
- G02 - OPTICS
Information Patent Application
Confocal wafer inspection method and apparatus
- Publication number 20050156098
- Publication date Jul 21, 2005
- Christopher R. Fairley
- G02 - OPTICS
Information Patent Application
High throughput brightfield/darkfield wafer inspection system using...
- Publication number 20050062962
- Publication date Mar 24, 2005
- Christopher R. Fairley
- G01 - MEASURING TESTING
Information Patent Application
High throughput brightfield/darkfield wafer inspection system using...
- Publication number 20040252297
- Publication date Dec 16, 2004
- KLA-Tencor Technologies Corporation
- Christopher R. Fairley
- G01 - MEASURING TESTING
Information Patent Application
High throughput brightfield/darkfield wafer inspection system using...
- Publication number 20020118359
- Publication date Aug 29, 2002
- KLA-Tencor Technologies Corporation
- Christopher R. Fairley
- G01 - MEASURING TESTING

Christopher R. Fairley

Person

Patents Grantslast 30 patents

Confocal wafer inspection system and method

High throughput brightfield/darkfield water inspection system using...

High throughput darkfield/brightfield wafer inspection system using...

Confocal wafer inspection method and apparatus using fly lens arran...

High throughput brightfield/darkfield wafer inspection system using...

High throughput darkfield/brightfield wafer inspection system using...

High throughput brightfield/darkfield wafer inspection system using...

Confocal wafer depth scanning inspection method

Confocal wafer inspection method and apparatus using fly lens arran...

High throughput brightfield/darkfield wafer inspection system using...

High throughput brightfield/darkfield wafer inspection system using...

Laser imaging system for inspection and analysis of sub-micron part...

Method and apparatus for automatically focusing a microscope

Method and apparatus for automatic focusing of a confocal laser mic...

Method and structure for generating a surface image of a three dime...

Laser imaging system for inspection and analysis of sub-micron part...

Phase measurement system using a dithered clock

Patents Applicationslast 30 patents

Confocal wafer inspection system and method

High throughput brightfield/darkfield water inspection system using...

High throughput darkfield/brightfield wafer inspection system using...

High throughput darkfield/brightfield wafer inspection system using...

Confocal wafer inspection method and apparatus using fly lens arran...

Confocal wafer inspection method and apparatus

High throughput brightfield/darkfield wafer inspection system using...

High throughput brightfield/darkfield wafer inspection system using...

High throughput brightfield/darkfield wafer inspection system using...