Christopher S. OLSEN

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Methods of selective oxidation on rapid thermal processing (RTP) ch...
- Patent number 12,341,032
- Issue date Jun 24, 2025
- Applied Materials, Inc.
- Chaitanya Anjaneyalu Prasad
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual pressure oxidation method for forming an oxide layer in a feature
- Patent number 12,272,531
- Issue date Apr 8, 2025
- Applied Materials, Inc.
- Christopher S. Olsen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of linearized film oxidation growth
- Patent number 12,261,039
- Issue date Mar 25, 2025
- Applied Materials, Inc.
- Christopher S. Olsen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing system and method of delivering a reactant gas
- Patent number 12,139,790
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Vishwas Kumar Pandey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective oxidation on rapid thermal processing (RTP) chamber with...
- Patent number 11,996,305
- Issue date May 28, 2024
- Applied Materials, Inc.
- Chaitanya Anjaneyalu Prasad
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chamber inlet
- Patent number D1023987
- Issue date Apr 23, 2024
- Applied Materials, Inc.
- Eric Kihara Shono
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Asymmetric injection for better wafer uniformity
- Patent number 11,959,169
- Issue date Apr 16, 2024
- Applied Materials, Inc.
- Eric Kihara Shono
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Steam oxidation initiation for high aspect ratio conformal radical...
- Patent number 11,948,791
- Issue date Apr 2, 2024
- Applied Materials, Inc.
- Christopher S. Olsen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for processing a substrate by oscillating a boundary layer o...
- Patent number 11,761,080
- Issue date Sep 19, 2023
- Applied Materials, Inc.
- Tsung-Han Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for supplying improved gas flow to a processin...
- Patent number 11,732,355
- Issue date Aug 22, 2023
- Applied Materials, Inc.
- Vishwas Kumar Pandey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for supplying improved gas flow to a processin...
- Patent number 11,697,875
- Issue date Jul 11, 2023
- Applied Materials, Inc.
- Vishwas Kumar Pandey
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Remote plasma oxidation chamber
- Patent number 11,615,944
- Issue date Mar 28, 2023
- Applied Materials, Inc.
- Christopher S. Olsen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of linearized film oxidation growth
- Patent number 11,610,776
- Issue date Mar 21, 2023
- Applied Materials, Inc.
- Christopher S. Olsen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for selective nitridation process
- Patent number 11,581,408
- Issue date Feb 14, 2023
- Applied Materials, Inc.
- Matthew Scott Rogers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Growth of thin oxide layer with amorphous silicon and oxidation
- Patent number 11,569,245
- Issue date Jan 31, 2023
- Applied Materials, Inc.
- Christopher S. Olsen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas injector with baffle
- Patent number 11,529,592
- Issue date Dec 20, 2022
- Applied Materials, Inc.
- Vishwas Kumar Pandey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Side inject designs for improved radical concentrations
- Patent number 11,501,945
- Issue date Nov 15, 2022
- Applied Materials, Inc.
- Eric Kihara Shono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dogbone inlet cone profile for remote plasma oxidation chamber
- Patent number 11,501,954
- Issue date Nov 15, 2022
- Applied Materials, Inc.
- Vishwas Kumar Pandey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Asymmetric injection for better wafer uniformity
- Patent number 11,486,038
- Issue date Nov 1, 2022
- Applied Materials, Inc.
- Eric Kihara Shono
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Conformal oxidation processes for 3D NAND
- Patent number 11,322,347
- Issue date May 3, 2022
- Applied Materials, Inc.
- Johanes F. Swenberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Steam oxidation initiation for high aspect ratio conformal radical...
- Patent number 11,189,485
- Issue date Nov 30, 2021
- Applied Materials, Inc.
- Christopher S. Olsen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning method
- Patent number 11,087,979
- Issue date Aug 10, 2021
- Applied Materials, Inc.
- Christopher S. Olsen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas injector with baffle
- Patent number 11,077,410
- Issue date Aug 3, 2021
- Applied Materials, Inc.
- Vishwas Kumar Pandey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Argon addition to remote plasma oxidation
- Patent number 11,081,340
- Issue date Aug 3, 2021
- Applied Materials, Inc.
- Hansel Lo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chamber inlet
- Patent number D924825
- Issue date Jul 13, 2021
- Applied Materials, Inc.
- Eric Kihara Shono
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Dogbone inlet cone profile for remote plasma oxidation chamber
- Patent number 11,049,696
- Issue date Jun 29, 2021
- Applied Materials, Inc.
- Vishwas Kumar Pandey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for selective nitridation process
- Patent number 10,950,698
- Issue date Mar 16, 2021
- Applied Materials, Inc.
- Matthew Scott Rogers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for conformal treatment of dielectric films with low therma...
- Patent number 10,886,122
- Issue date Jan 5, 2021
- Applied Materials, Inc.
- Heng Pan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High pressure ammonia nitridation of tunnel oxide for 3DNAND applic...
- Patent number 10,870,911
- Issue date Dec 22, 2020
- Applied Materials, Inc.
- Christopher S. Olsen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleaning method
- Patent number 10,861,693
- Issue date Dec 8, 2020
- Applied Materials, Inc.
- Peter Stone
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
INLINE FILTRATION FOR STEAM APPLICATIONS
- Publication number 20250161858
- Publication date May 22, 2025
- Applied Materials, Inc.
- Chaitanya Anjaneyalu PRASAD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TARGETED GAS DELIVERY VIA SIDE GAS INJECTION
- Publication number 20250087506
- Publication date Mar 13, 2025
- Applied Materials, Inc.
- Tobin Kaufman-Osborn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GROWTH OF THIN OXIDE LAYER WITH SILICON NITRIDE AND CONVERSION
- Publication number 20250075321
- Publication date Mar 6, 2025
- Applied Materials, Inc.
- Fredrick FISHBURN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF FORMING ABRUPT INTERFACES BETWEEN SILICON-AND-CARBON-CON...
- Publication number 20250037987
- Publication date Jan 30, 2025
- Applied Materials, Inc.
- Stephen Weeks
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLENUM DRIVEN HYDROXYL COMBUSTION OXIDATION
- Publication number 20240360559
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Christopher S. OLSEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ORIFICE SURROUNDED LOW PRESSURE HYDROXYL COMBUSTION
- Publication number 20240360996
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Christopher S. OLSEN
- C01 - INORGANIC CHEMISTRY
Information Patent Application
ORIFICE DRIVEN HYDROXYL COMBUSTION OXIDATION
- Publication number 20240350994
- Publication date Oct 24, 2024
- Applied Materials, Inc.
- Christopher S. OLSEN
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SELECTIVE OXIDATION PROCESSES FOR GATE-ALL-AROUND TRANSISTORS
- Publication number 20240321584
- Publication date Sep 26, 2024
- Applied Materials, Inc.
- Byeong Chan Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR PRECLEANING A SUBSTRATE SURFACE PRIOR TO E...
- Publication number 20240301584
- Publication date Sep 12, 2024
- Applied Materials, Inc.
- Christopher S. OLSEN
- C30 - CRYSTAL GROWTH
Information Patent Application
INDPENDENT DILUTION INJECT FOR REMOTE PLASMA OXIDATION
- Publication number 20240297022
- Publication date Sep 5, 2024
- Applied Materials, Inc.
- Hansel LO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF SELECTIVE OXIDATION ON RAPID THERMAL PROCESSING (RTP) CH...
- Publication number 20240282601
- Publication date Aug 22, 2024
- Applied Materials, Inc.
- Chaitanya Anjaneyalu Prasad
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING IMPROVEMENT
- Publication number 20240266146
- Publication date Aug 8, 2024
- Applied Materials, Inc.
- Christopher S. OLSEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BOTTOM THICK OXIDATION GROWTH IN HIGH ASPECT RATIO FEATURES
- Publication number 20240242962
- Publication date Jul 18, 2024
- Applied Materials, Inc.
- Dimitrios PAVLOPOULOS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OXIDATION CONFORMALITY IMPROVEMENT WITH IN-SITU INTEGRATED PROCESSING
- Publication number 20240177990
- Publication date May 30, 2024
- Applied Materials, Inc.
- Hansel LO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADDITION OF EXTERNAL ULTRAVIOLET LIGHT FOR IMPROVED PLASMA STRIKE C...
- Publication number 20240162011
- Publication date May 16, 2024
- Applied Materials, Inc.
- Eric Kihara SHONO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE OXIDATION OF A SUBSTRATE
- Publication number 20240112903
- Publication date Apr 4, 2024
- Applied Materials, Inc.
- Hansel Lo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR SUPPLYING IMPROVED GAS FLOW TO A PROCESSIN...
- Publication number 20230407471
- Publication date Dec 21, 2023
- Applied Materials, Inc.
- Vishwas Kumar PANDEY
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
METHOD OF LINEARIZED FILM OXIDATION GROWTH
- Publication number 20230223250
- Publication date Jul 13, 2023
- Applied Materials, Inc.
- Christopher S. OLSEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DUAL PRESSURE OXIDATION METHOD FOR FORMING AN OXIDE LAYER IN A FEATURE
- Publication number 20230207291
- Publication date Jun 29, 2023
- Applied Materials, Inc.
- Christopher S. OLSEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INJECTION MODULE FOR A PROCESS CHAMBER
- Publication number 20230133402
- Publication date May 4, 2023
- Applied Materials, Inc.
- Christopher S. OLSEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ASYMMETRIC INJECTION FOR BETTER WAFER UNIFORMITY
- Publication number 20230028054
- Publication date Jan 26, 2023
- Applied Materials, Inc.
- Eric Kihara Shono
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE OXIDATION ON RAPID THERMAL PROCESSING (RTP) CHAMBER WITH...
- Publication number 20220415676
- Publication date Dec 29, 2022
- Chaitanya Anjaneyalu PRASAD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING SYSTEM AND METHOD OF DELIVERING A REACTANT GAS
- Publication number 20220411927
- Publication date Dec 29, 2022
- Applied Materials, Inc.
- Vishwas Kumar PANDEY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WINDOWS FOR RAPID THERMAL PROCESSING CHAMBERS
- Publication number 20220353956
- Publication date Nov 3, 2022
- Applied Materials, Inc.
- Christopher S. OLSEN
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD OF LINEARIZED FILM OXIDATION GROWTH
- Publication number 20220254622
- Publication date Aug 11, 2022
- Applied Materials, Inc.
- Christopher S. OLSEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS SYSTEM WITH VARIABLE FLOW VALVE
- Publication number 20220223383
- Publication date Jul 14, 2022
- Applied Materials, Inc.
- Eric Kihara SHONO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OSCILLATING FLOW BOUNDARY LAYERS IN APPARATUS, METHODS, AND SYSTEMS...
- Publication number 20220213595
- Publication date Jul 7, 2022
- Applied Materials, Inc.
- Tsung-Han YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NOVEL AND EFFECTIVE HOMOGENIZE FLOW MIXING DESIGN
- Publication number 20220165547
- Publication date May 26, 2022
- Applied Materials, Inc.
- Vishwas Kumar PANDEY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND SYSTEM FOR DELIVERING GAS TO A PROCESS CHAMBER
- Publication number 20220154338
- Publication date May 19, 2022
- Applied Materials, Inc.
- Christopher S. OLSEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GROWTH OF THIN OXIDE LAYER WITH AMORPHOUS SILICON AND OXIDATION
- Publication number 20220130837
- Publication date Apr 28, 2022
- Applied Materials, Inc.
- Christopher S. Olsen
- H01 - BASIC ELECTRIC ELEMENTS

Christopher S. OLSEN

Person

Patents Grantslast 30 patents

Methods of selective oxidation on rapid thermal processing (RTP) ch...

Dual pressure oxidation method for forming an oxide layer in a feature

Method of linearized film oxidation growth

Processing system and method of delivering a reactant gas

Selective oxidation on rapid thermal processing (RTP) chamber with...

Chamber inlet

Asymmetric injection for better wafer uniformity

Steam oxidation initiation for high aspect ratio conformal radical...

Method for processing a substrate by oscillating a boundary layer o...

Method and apparatus for supplying improved gas flow to a processin...

Method and apparatus for supplying improved gas flow to a processin...

Remote plasma oxidation chamber

Method of linearized film oxidation growth

Method and apparatus for selective nitridation process

Growth of thin oxide layer with amorphous silicon and oxidation

Gas injector with baffle

Side inject designs for improved radical concentrations

Dogbone inlet cone profile for remote plasma oxidation chamber

Asymmetric injection for better wafer uniformity

Conformal oxidation processes for 3D NAND

Steam oxidation initiation for high aspect ratio conformal radical...

Cleaning method

Gas injector with baffle

Argon addition to remote plasma oxidation

Chamber inlet

Dogbone inlet cone profile for remote plasma oxidation chamber

Method and apparatus for selective nitridation process

Methods for conformal treatment of dielectric films with low therma...

High pressure ammonia nitridation of tunnel oxide for 3DNAND applic...

Cleaning method

Patents Applicationslast 30 patents

INLINE FILTRATION FOR STEAM APPLICATIONS

TARGETED GAS DELIVERY VIA SIDE GAS INJECTION

GROWTH OF THIN OXIDE LAYER WITH SILICON NITRIDE AND CONVERSION

METHODS OF FORMING ABRUPT INTERFACES BETWEEN SILICON-AND-CARBON-CON...

PLENUM DRIVEN HYDROXYL COMBUSTION OXIDATION

ORIFICE SURROUNDED LOW PRESSURE HYDROXYL COMBUSTION

ORIFICE DRIVEN HYDROXYL COMBUSTION OXIDATION

SELECTIVE OXIDATION PROCESSES FOR GATE-ALL-AROUND TRANSISTORS

METHOD AND APPARATUS FOR PRECLEANING A SUBSTRATE SURFACE PRIOR TO E...

INDPENDENT DILUTION INJECT FOR REMOTE PLASMA OXIDATION

METHODS OF SELECTIVE OXIDATION ON RAPID THERMAL PROCESSING (RTP) CH...

PLASMA PROCESSING IMPROVEMENT

BOTTOM THICK OXIDATION GROWTH IN HIGH ASPECT RATIO FEATURES

OXIDATION CONFORMALITY IMPROVEMENT WITH IN-SITU INTEGRATED PROCESSING

ADDITION OF EXTERNAL ULTRAVIOLET LIGHT FOR IMPROVED PLASMA STRIKE C...

SELECTIVE OXIDATION OF A SUBSTRATE

METHOD AND APPARATUS FOR SUPPLYING IMPROVED GAS FLOW TO A PROCESSIN...

METHOD OF LINEARIZED FILM OXIDATION GROWTH

DUAL PRESSURE OXIDATION METHOD FOR FORMING AN OXIDE LAYER IN A FEATURE

INJECTION MODULE FOR A PROCESS CHAMBER

ASYMMETRIC INJECTION FOR BETTER WAFER UNIFORMITY

SELECTIVE OXIDATION ON RAPID THERMAL PROCESSING (RTP) CHAMBER WITH...

PROCESSING SYSTEM AND METHOD OF DELIVERING A REACTANT GAS

WINDOWS FOR RAPID THERMAL PROCESSING CHAMBERS

METHOD OF LINEARIZED FILM OXIDATION GROWTH

PROCESS SYSTEM WITH VARIABLE FLOW VALVE

OSCILLATING FLOW BOUNDARY LAYERS IN APPARATUS, METHODS, AND SYSTEMS...

NOVEL AND EFFECTIVE HOMOGENIZE FLOW MIXING DESIGN

APPARATUS AND SYSTEM FOR DELIVERING GAS TO A PROCESS CHAMBER

GROWTH OF THIN OXIDE LAYER WITH AMORPHOUS SILICON AND OXIDATION