Christopher Voges

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Eden Prairie, MN, US

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Patents Grantslast 30 patents

Information Patent Grant
Wafer inspection system including a laser triangulation sensor
- Patent number 11,578,967
- Issue date Feb 14, 2023
- Onto Innovation Inc.
- John Schaefer
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
On-axis focus sensor and method
- Patent number 9,594,230
- Issue date Mar 14, 2017
- Rudolph Technologies, Inc.
- Dennis L. Ohren
- G02 - OPTICS
Information Patent Grant
Wafer edge inspection illumination system
- Patent number 9,062,859
- Issue date Jun 23, 2015
- Rudolph Technologies, Inc.
- Christopher Voges
- F21 - LIGHTING
Information Patent Grant
Wafer edge inspection
- Patent number 8,426,223
- Issue date Apr 23, 2013
- Rudolph Technologies, Inc.
- Christopher Voges
- F21 - LIGHTING

Patents Applicationslast 30 patents

Information Patent Application
WAFER INSPECTION SYSTEM INCLUDING A LASER TRIANGULATION SENSOR
- Publication number 20230266117
- Publication date Aug 24, 2023
- ONTO INNOVATION INC.
- John Schaefer
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
WAFER INSPECTION SYSTEM INCLUDING A LASER TRIANGULATION SENSOR
- Publication number 20200191557
- Publication date Jun 18, 2020
- Rudolph Technologies, Inc.
- John Schaefer
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ON-AXIS FOCUS SENSOR AND METHOD
- Publication number 20140368635
- Publication date Dec 18, 2014
- Dennis L. Ohren
- G02 - OPTICS
Information Patent Application
WAFER EDGE INSPECTION
- Publication number 20140063799
- Publication date Mar 6, 2014
- Rudolph Technologies, Inc.
- Christopher Voges
- G01 - MEASURING TESTING
Information Patent Application
WAFER EDGE INSPECTION
- Publication number 20110263049
- Publication date Oct 27, 2011
- Rudolph Technologies, Inc.
- Christopher Voges
- F21 - LIGHTING