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Christopher W. Hodgdon
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East Kingston, NH, US
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last 30 patents
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Patent Grant
Fluorine based cleaning of an ion source
Patent number
7,531,819
Issue date
May 12, 2009
Axcelis Technologies, Inc.
William F. DiVergilio
B08 - CLEANING
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last 30 patents
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Patent Application
Fluorine based cleaning of an ion source
Publication number
20070137671
Publication date
Jun 21, 2007
Axcelis Technologies, Inc.
William F. DiVergilio
B08 - CLEANING