Chu-Yeu Peter Yang

Follow

Person

Dublin, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Vitreous carbon mask substrate for X-ray lithography
- Patent number 7,608,367
- Issue date Oct 27, 2009
- Sandia Corporation
- Georg Aigeldinger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY