Chuan-Kai Lo

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Hsin Chu, TW

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Patents Grantslast 30 patents

Information Patent Grant
All dual damascene oxide etch process steps in one confined plasma...
- Patent number 6,559,049
- Issue date May 6, 2003
- Lam Research Corporation
- Lawrence Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ultra-high oxide to photoresist selective etch of high-aspect-ratio...
- Patent number 6,486,070
- Issue date Nov 26, 2002
- Lam Research Corporation
- Chok W. Ho
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
All dual damascene oxide etch process steps in one confined plasma...
- Publication number 20030032278
- Publication date Feb 13, 2003
- LAM RESEARCH CORPORATION
- Lawrence Chen
- H01 - BASIC ELECTRIC ELEMENTS