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Chuan-Wei Kuo
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Kaohsiung, TW
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last 30 patents
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Patent Grant
Method for drying wafer at room temperature
Patent number
11,417,511
Issue date
Aug 16, 2022
National Sun Yat-sen University
Ting-Chang Chang
B08 - CLEANING
Patents Applications
last 30 patents
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Patent Application
METHOD FOR DRYING WAFER
Publication number
20240387163
Publication date
Nov 21, 2024
NATIONAL SUN YAT-SEN UNIVERSITY
TING-CHANG CHANG
H01 - BASIC ELECTRIC ELEMENTS