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Hsinchu City, TW
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last 30 patents
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Patent Grant
Movement microelectromechanical systems (MEMS) package
Patent number
9,527,721
Issue date
Dec 27, 2016
Taiwan Semiconductor Manufacturing Co., Ltd.
Shyh-Wei Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Mechanism for forming MEMS device
Patent number
9,090,452
Issue date
Jul 28, 2015
Taiwan Semiconductor Manufacturing Co., Ltd.
Shyh-Wei Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
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last 30 patents
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Patent Application
Movement Microelectromechanical Systems (MEMS) Package
Publication number
20160332863
Publication date
Nov 17, 2016
Taiwan Semiconductor Manufacturing Co., LTD
Shyh-Wei Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MECHANISM FOR FORMING MEMS DEVICE
Publication number
20150158716
Publication date
Jun 11, 2015
Taiwan Semiconductor Manufacturing Co., LTD
Shyh-Wei CHENG
B81 - MICRO-STRUCTURAL TECHNOLOGY