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Chuanmin ZHANG
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Shanghai, CN
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last 30 patents
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Patent Grant
Fabrication method for improving surface planarity after tungsten c...
Patent number
8,673,768
Issue date
Mar 18, 2014
Shanghai Huali Microelectronics Corporation
Jingxun Fang
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
FABRICATION METHOD FOR IMPROVING SURFACE PLANARITY AFTER TUNGSTEN C...
Publication number
20130224949
Publication date
Aug 29, 2013
SHANGHAI HUALI MICROELECTRONICS CORPORATION
Jingxun FANG
H01 - BASIC ELECTRIC ELEMENTS