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Chue-San Yoo

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  • Hsin-chu, TW
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    PELLICLE HAVING VENT HOLE
    • Publication number 20240329517
    • Publication date Oct 3, 2024
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Chue San YOO
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    SYSTEM AND STRUCTURE INCLUDING A PELLICLE
    • Publication number 20240103358
    • Publication date Mar 28, 2024
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Chue San YOO
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    PELLICLE AND METHOD OF USING THE SAME
    • Publication number 20230061320
    • Publication date Mar 2, 2023
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Chue San YOO
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    PELLICLE HAVING VENT HOLE
    • Publication number 20220026797
    • Publication date Jan 27, 2022
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Chue San YOO
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    PELLICLE AND METHOD OF USING THE SAME
    • Publication number 20200264505
    • Publication date Aug 20, 2020
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Chue San YOO
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    PATTERN TRANSFER TECHNIQUE AND METHOD OF MANUFACTURING THE SAME
    • Publication number 20200027747
    • Publication date Jan 23, 2020
    • Taiwan Semiconductor Manufacturing Co., LTD
    • Chue San Yoo
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PELLICLE REMOVAL METHOD
    • Publication number 20190094683
    • Publication date Mar 28, 2019
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Chue San YOO
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Apparatus and a Method of Forming a Particle Shield
    • Publication number 20190094719
    • Publication date Mar 28, 2019
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Wen-Hao Cheng
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    PELLICLE AND METHOD OF USING THE SAME
    • Publication number 20180329288
    • Publication date Nov 15, 2018
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Chue San YOO
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Graphene Pellicle for Extreme Ultraviolet Lithography
    • Publication number 20180059534
    • Publication date Mar 1, 2018
    • Taiwan Semiconductor Manufacturing Co., LTD
    • Chih-Chiang Tu
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Apparatus and a Method of Forming a Particle Shield
    • Publication number 20180017880
    • Publication date Jan 18, 2018
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Chue San YOO
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    PATTERN TRANSFER TECHNIQUE AND METHOD OF MANUFACTURING THE SAME
    • Publication number 20170372917
    • Publication date Dec 28, 2017
    • Taiwan Semiconductor Manufacturing Co., LTD
    • Chue San Yoo
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    APPARATUS AND A METHOD OF FORMING A PARTICLE SHIELD
    • Publication number 20170363974
    • Publication date Dec 21, 2017
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Chue San YOO
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    APPARATUS FOR SHIELDING RETICLE
    • Publication number 20170199471
    • Publication date Jul 13, 2017
    • Taiwan Semiconductor Manufacturing company Ltd.
    • WEN-HAO CHENG
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Multiple-Patterning Photolithographic Mask and Method
    • Publication number 20150198887
    • Publication date Jul 16, 2015
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Chue San Yoo
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Lithography Mask and Method of Forming a Lithography Mask
    • Publication number 20150132685
    • Publication date May 14, 2015
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Chue San Yoo
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Multiple-Patterning Photolithographic Mask and Method
    • Publication number 20140178803
    • Publication date Jun 26, 2014
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Chue San Yoo
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Lithography Mask and Method of Forming a Lithography Mask
    • Publication number 20130095414
    • Publication date Apr 18, 2013
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Chue-San Yoo
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    MASK BLANK, MASK FORMED FROM THE BLANK, AND METHOD OF FORMING A MASK
    • Publication number 20100119958
    • Publication date May 13, 2010
    • Taiwan Semiconductor Manufacturing Co., LTD
    • Chue San YOO
    • B82 - NANO-TECHNOLOGY
  • Information Patent Application

    PHOTOMASK HAZE REDUCTION VIA VENTILATION
    • Publication number 20080266534
    • Publication date Oct 30, 2008
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Chue San Yoo
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    MASK AND BLANK STORAGE INNER GAS
    • Publication number 20080206683
    • Publication date Aug 28, 2008
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Cheng-Ming Lin
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Universal photomask
    • Publication number 20070178389
    • Publication date Aug 2, 2007
    • Chue San Yoo
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Whole new mask repair method
    • Publication number 20040224237
    • Publication date Nov 11, 2004
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Tzy-Ying Lin
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Planarization using laser ablation
    • Publication number 20010021594
    • Publication date Sep 13, 2001
    • TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
    • Chue-San Yoo
    • H01 - BASIC ELECTRIC ELEMENTS