Chueh-Chi KUO

Person

Kaohsiung City, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Method of cleaning wafer table of photolithography system and metho...
- Patent number 12,210,296
- Issue date Jan 28, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shih-Yu Tu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Semiconductor processing tool and methods of operation
- Patent number 12,164,235
- Issue date Dec 10, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shao-Hua Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate holder and methods of use
- Patent number 12,009,246
- Issue date Jun 11, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Chi Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of lithography process and transferring a reticle
- Patent number 11,982,944
- Issue date May 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hsiao-Lun Chang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Highly efficient automatic particle cleaner method for EUV systems
- Patent number 11,953,839
- Issue date Apr 9, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shih-Yu Tu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Semiconductor processing method and apparatus
- Patent number 11,830,754
- Issue date Nov 28, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Shang-Shiuan Deng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing tool and methods of operation
- Patent number 11,803,129
- Issue date Oct 31, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shao-Hua Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography system and method thereof
- Patent number 11,782,350
- Issue date Oct 10, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shao-Hua Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of lithography process using reticle container with discharg...
- Patent number 11,703,763
- Issue date Jul 18, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hsiao-Lun Chang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography system and method thereof
- Patent number 11,520,243
- Issue date Dec 6, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shao-Hua Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Highly efficient automatic particle cleaner method for EUV systems
- Patent number 11,520,246
- Issue date Dec 6, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shih-Yu Tu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reticle with conductive material structure
- Patent number 11,320,733
- Issue date May 3, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hsiao-Lun Chang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for lithography in semiconductor fabrication
- Patent number 11,121,018
- Issue date Sep 14, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chueh-Chi Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for discharging static charges on reticle
- Patent number 10,802,394
- Issue date Oct 13, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hsiao-Lun Chang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for lithography in semiconductor fabrication
- Patent number 10,714,371
- Issue date Jul 14, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chueh-Chi Kuo
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
- Publication number 20250053103
- Publication date Feb 13, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shao-Hua WANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ONSITE CLEANING SYSTEM AND METHOD
- Publication number 20240383013
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yen-Hao LIU
- B08 - CLEANING
Information Patent Application
SUBSTRATE HOLDER AND METHODS OF USE
- Publication number 20240304488
- Publication date Sep 12, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Chi TSAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF CLEANING WAFER TABLE OF PHOTOLITHOGRAPHY SYSTEM AND METHO...
- Publication number 20240210842
- Publication date Jun 27, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shih-Yu TU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ONSITE CLEANING SYSTEM AND METHOD
- Publication number 20240050993
- Publication date Feb 15, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yen-Hao LIU
- B08 - CLEANING
Information Patent Application
RETICLE COVERING PELLICLE FOR PHOTOLITHOGRPHY SCANNER
- Publication number 20240045323
- Publication date Feb 8, 2024
- TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
- Yen-Hao Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUSES AND METHODS FOR REDUCING PARTICLE CONTAMINATION OF WAFE...
- Publication number 20240006202
- Publication date Jan 4, 2024
- TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
- Zheng-Hao Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHY SYSTEM AND METHOD THEREOF
- Publication number 20230400784
- Publication date Dec 14, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shao-Hua WANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DETECTION METHOD OF EUV PELLICLE STATUS
- Publication number 20230393489
- Publication date Dec 7, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yen-Hao LIU
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SEMICONDUCTOR PROCESSING METHOD AND APPARATUS
- Publication number 20230386884
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shuang-Shiuan DENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
- Publication number 20230375947
- Publication date Nov 23, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shao-Hua WANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF LITHOGRAPHY PROCESS AND TRANSFERRING A RETICLE
- Publication number 20230305404
- Publication date Sep 28, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hsiao-Lun CHANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HIGHLY EFFICIENT AUTOMATIC PARTICLE CLEANER METHOD FOR EUV SYSTEMS
- Publication number 20230099309
- Publication date Mar 30, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shih-Yu TU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
- Publication number 20230046032
- Publication date Feb 16, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shao-Hua WANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY SYSTEM AND METHOD THEREOF
- Publication number 20220382172
- Publication date Dec 1, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shao-Hua WANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE HOLDER AND METHODS OF USE
- Publication number 20220310432
- Publication date Sep 29, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Chi TSAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING METHOD AND APPARATUS
- Publication number 20220310431
- Publication date Sep 29, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shang-Shiuan DENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR CLEANING AN EUV MASK WITHIN A SCANNER
- Publication number 20220299882
- Publication date Sep 22, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yuru Huang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF LITHOGRAPHY PROCESS USING RETICLE CONTAINER WITH DISCHARG...
- Publication number 20220260901
- Publication date Aug 18, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hsiao-Lun CHANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY SYSTEM AND METHOD THEREOF
- Publication number 20220066331
- Publication date Mar 3, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shao-Hua WANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RETICLE WITH CONDUCTIVE MATERIAL STRUCTURE
- Publication number 20210026236
- Publication date Jan 28, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hsiao-Lun CHANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR LITHOGRAPHY IN SEMICONDUCTOR FABRICATION
- Publication number 20200350194
- Publication date Nov 5, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chueh-Chi KUO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR DISCHARGING STATIC CHARGES ON RETICLE
- Publication number 20190155139
- Publication date May 23, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hsiao-Lun CHANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR LITHOGRAPHY IN SEMICONDUCTOR FABRICATION
- Publication number 20190148203
- Publication date May 16, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chueh-Chi KUO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Chueh-Chi KUO

Person

Patents Grantslast 30 patents

Method of cleaning wafer table of photolithography system and metho...

Semiconductor processing tool and methods of operation

Substrate holder and methods of use

Method of lithography process and transferring a reticle

Highly efficient automatic particle cleaner method for EUV systems

Semiconductor processing method and apparatus

Semiconductor processing tool and methods of operation

Lithography system and method thereof

Method of lithography process using reticle container with discharg...

Lithography system and method thereof

Highly efficient automatic particle cleaner method for EUV systems

Reticle with conductive material structure

Method and apparatus for lithography in semiconductor fabrication

Method for discharging static charges on reticle

Method and apparatus for lithography in semiconductor fabrication

Patents Applicationslast 30 patents

SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION

ONSITE CLEANING SYSTEM AND METHOD

SUBSTRATE HOLDER AND METHODS OF USE

METHOD OF CLEANING WAFER TABLE OF PHOTOLITHOGRAPHY SYSTEM AND METHO...

ONSITE CLEANING SYSTEM AND METHOD

RETICLE COVERING PELLICLE FOR PHOTOLITHOGRPHY SCANNER

APPARATUSES AND METHODS FOR REDUCING PARTICLE CONTAMINATION OF WAFE...

LITHOGRAPHY SYSTEM AND METHOD THEREOF

DETECTION METHOD OF EUV PELLICLE STATUS

SEMICONDUCTOR PROCESSING METHOD AND APPARATUS

SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION

METHOD OF LITHOGRAPHY PROCESS AND TRANSFERRING A RETICLE

HIGHLY EFFICIENT AUTOMATIC PARTICLE CLEANER METHOD FOR EUV SYSTEMS

SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION

LITHOGRAPHY SYSTEM AND METHOD THEREOF

SUBSTRATE HOLDER AND METHODS OF USE

SEMICONDUCTOR PROCESSING METHOD AND APPARATUS

SYSTEM AND METHOD FOR CLEANING AN EUV MASK WITHIN A SCANNER

METHOD OF LITHOGRAPHY PROCESS USING RETICLE CONTAINER WITH DISCHARG...

LITHOGRAPHY SYSTEM AND METHOD THEREOF

RETICLE WITH CONDUCTIVE MATERIAL STRUCTURE

METHOD AND APPARATUS FOR LITHOGRAPHY IN SEMICONDUCTOR FABRICATION

METHOD FOR DISCHARGING STATIC CHARGES ON RETICLE

METHOD AND APPARATUS FOR LITHOGRAPHY IN SEMICONDUCTOR FABRICATION