Chulsoo Byun

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Seoul, KR

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Patents Grantslast 30 patents

Information Patent Grant
Showerhead for film depositing vacuum equipment
- Patent number 9,315,897
- Issue date Apr 19, 2016
- Korea Institute of Industrial Technology
- Chulsoo Byun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for chemical vapor deposition capable of preventing contamin...
- Patent number 7,485,339
- Issue date Feb 3, 2009
- Chulsoo Byun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for chemical vapor deposition capable of preve...
- Patent number 7,156,921
- Issue date Jan 2, 2007
- Chulsoo Byun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SHOWERHEAD FOR FILM DEPOSITING VACUUM EQUIPMENT
- Publication number 20120067971
- Publication date Mar 22, 2012
- Korea Institute of Industrial Tedhnology
- Chulsoo Byun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for chemical vapor deposition capable of preve...
- Publication number 20070065599
- Publication date Mar 22, 2007
- Chulsoo Byun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for chemical vapor deposition capable of preve...
- Publication number 20030077388
- Publication date Apr 24, 2003
- Chulsoo Byun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...