Chun-Hao Chen

Follow

Person

Portland, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
Throughput improvement with interval conditioning purging
- Patent number 12,291,777
- Issue date May 6, 2025
- Lam Research Corporation
- Chun-Hao Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
RADIO FREQUENCY (RF) POWER IMBALANCING IN A MULTI-STATION INTEGRATE...
- Publication number 20220375721
- Publication date Nov 24, 2022
- LAM RESEARCH CORPORATION
- Jeremy David Fields
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THROUGHPUT IMPROVEMENT WITH INTERVAL CONDITIONING PURGING
- Publication number 20210395885
- Publication date Dec 23, 2021
- LAM RESEARCH CORPORATION
- Chun-Hao Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...